Electrostatically-actuated tunable optical components using entropic materials

• US 6,519,074 B2
• Filed: 03/20/2001
• Issued: 02/11/2003
• Est. Priority Date: 03/20/2000
• Status: Expired due to Fees

• Current Assignee: Parvenu, Inc.
• Original Assignee: Parvenu, Inc.
• Inventors: Verma, Ravi J., Little, Michael J.
• Primary Examiner(s): Epps; Georgia
• Assistant Examiner(s): Dinh; Jack
• Application Number:
  US09/811,612
• Publication Number:
  US 20010055147A1
• Time in Patent Office: 693 Days
• Field of Search: 359/290,291,292,295,298,214,224,230 310/306,307 385/140,73,24
• US Class Current: 359/290
• CPC Class Codes: G01B 2290/25 Fabry-Perot in interferometer, e.g. etalon, cavity
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence

Abstract

A cost-effective tunable optical component uses entropic, rather than enthalpic, materials to provide a compliant member that supports the optical element and is driven by an electrostatic actuator. Entropic materials exhibit an entropic plateau region over a wide frequency range with a Young'"'"'s modulus much lower than enthalpic materials, linear elastic behavior over a wide deformation range, and, in certain geometries, energy and stress behavior that tend to stabilize the optical element during deformation. The compliant member can be configured in a variety of geometries including compression, tension, tensile/compressive and shear and of a variety of materials including elastomers, aerogels or other long chained polymers.

Claims

1. A tunable optical component, comprising:

a counter electrode;

a movable optical element;

a compliant member that supports the movable optical element, said compliant member being formed of a material that exhibits an entropic plateau region; and

an electrostatic actuator for applying an electrostatic force that deforms the compliant member and moves the optical element as a function of an electric command signal.

2. The tunable optical component of claim 1, wherein the material comprises long chain polymers with at least 100 bonds per chain that are fully crosslinked at least 90% of the bonds.

3. The tunable optical component of claim 2, wherein the material is selected from one of an elastomer, aerogel or long chain polymer.

4. The tunable optical component of claim 1, wherein the material exhibits a Young'"'"'s modulus less than 5 MPa in the entropic plateau region.

5. The tunable optical component of claim 1, wherein said optical element moves at a scan rate, the entropic plateau region extending over multiple frequency decade with an upper corner frequency at least one order of magnitude greater than the scan rate.

6. The tunable optical component of claim 1, wherein said movement deforms the compliant member over a deformation range, the material, hence the compliant member exhibits a linear elastic behavior over the entire deformation range.

7. The tunable optical component of claim 1, wherein the material is incompressible and the compliant member undergoes no volume change during deformation, said material exhibiting an energy cost of misalignment of the movable optical element that is at least an order of magnitude greater than the energy cost of deformation thereby self-stabilizing the optical element.

8. The tunable optical component of claim 1, wherein the material undergoes sheer deformation, said material exhibiting a normal stress that provides a force on the optical element perpendicular to the direction of motion thereby further self-stabilizing the optical element.

9. The tunable optical component of claim 1, wherein said movement scans the optical element with a time constant t_scan, said material undergoes a volume change during deformation that causes a viscous flow with a time constant t_response that is at least one order of magnitude less than t_scan.

10. The tunable optical component of claim 9, wherein the material undergoes compressive stress during deformation, said material being doped with small molecules to reduce its viscosity such that t_response is at least one order of magnitude less than t_scan.

11. The tunable optical component of claim 9, wherein the material lies undergoes compressive stress during deformation, said material network is modified to reduce its viscosity such that t_response is at least one order of magnitude less than t_scan.

12. The tunable optical component of claim 9, wherein the material undergoes tensile stress during deformation, said material having a thickness such that tresponse is at least one order of magnitude less than tscan.

13. The tunable optical component of claim 1, wherein the compliant member and the material lie outside an optical path.

14. The tunable optical component of claim 1, wherein the compliant member forms a diaphragm that supports said movable optical element and undergoes tensile/compressive deformation response to said movement.

15. The tunable optical component of claim 14, wherein the diaphragm has an aspect ratio less than 1.

16. The tunable optical component of claim 1, wherein the compliant member forms a sleeve that supports the movable optical element and undergoes sheer deformation in response to the variable dimensioning.

17. The tunable optical component of claim 16, wherein the sleeve has an aspect ratio greater than 1.

18. The tunable optical component of claim 16, wherein the material undergoes no volume change during sheer deformation such that the energy cost of misalignment of the movable optical element is at least an order of magnitude greater than the energy cost of deformation thereby self-stabilizing the movable optical element.

19. The tunable optical component of claim 16, wherein the material exhibits a normal stress that provides a force on the movable optical element perpendicular to the direction of motion thereby further self-stabilizing the movable optical element.