Method and apparatus for a direct bonded isolated pressure sensor

• US 6,520,020 B1
• Filed: 01/06/2000
• Issued: 02/18/2003
• Est. Priority Date: 01/06/2000
• Status: Expired due to Term

• Current Assignee: Rosemount Incorporated (Emerson Electric Company)
• Original Assignee: Rosemount Incorporated (Emerson Electric Company)
• Inventors: Toy, Adrian C., Lutz, Mark A., Frick, Roger, Sittler, Fred C.
• Primary Examiner(s): OEN, WILLIAM L
• Application Number:
  US09/478,383
• Time in Patent Office: 1,139 Days
• Field of Search: 737/06, 737/24, 737/18, 737/17, 731/47, 737/05, 737/00, 731/80, 731/16, 731/15, 737/20, 361/283.4, 361/283.1, 361/283, 374/143, 324/661, 324/688
• US Class Current: 73/706
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A pressure sensor integrally formed in the shape of a beam around a central channel. The beam has an integral blind end that is pressurized by the fluid. The beam has an opposite end that is shaped to provide a stepped corner with a gap opening at the base of the stepped corner, where the gap and isolated from the fluid. A sensing film in the channel adjacent the blind end has an electrical parameter that varies with pressure and electrical leads that extend from the channel and out the gap. A seal fills the gap around the leads and the seal fills a portion of the stepped corner. The sensor is preferably formed by direct bonding of single crystal alumina layers. Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.

Claims

1. A pressure sensor, comprising:

a beam integrally formed around a central channel, the beam having an integral blind end adapted for fluid pressurization and an opposite end shaped to provide a stepped corner with a gap opening at a base of the stepped corner where the gap is isolated from the fluid;

a sensing film in the central channel adjacent the blind end, the sensing film having an electrical parameter that varies with pressure and electrical leads extending from the channel and out the gap; and

a glass frit seal filling the gap around the leads, the glass frit seal filling a portion of the stepped corner.

2. The pressure sensor of claim 1 wherein the beam is formed of directly bonded shaped alumina layers and the gap is between the layers.

3. The pressure sensor of claim 2 wherein the layers include:

a first layer having a first cavity etched in the first layer, the first cavity surrounded by an outer rim;

a second layer having a second cavity etched in the second layer, the second cavity extending past the outer rim, forming the gap between the second cavity and the outer rim.

4. The pressure sensor of claim 2 wherein the electrical parameter that varies with pressure is capacitance.

5. The pressure sensor of claim 4 wherein at least one of the alumina layers is formed of single crystal alumina.

6. The pressure sensor of claim 5 wherein the beam is formed of multiple layers of single crystal material.

7. The pressure sensor of claim 6 wherein the leads going out the gap are formed of the same material as the sensing film.

8. A pressure sensor module, comprising:

a beam integrally formed around a central channel, the beam having an integral blind end adapted for fluid pressurization, and an opposite end shaped to provide a stepped corner with a gap opening at a base of the stepped corner where the gap is isolated from the fluid;

a sensing film in the central channel adjacent the blind end, the sensing film having an electrical parameter that varies with pressure, and electrical leads extending from the channel and out the gap;

a glass frit seal filling the gap around the leads, the glass frit seal filling a portion of the stepped corner; and

an isolation cup having an opening sealed to an outer surface of the beam between the blind end and the opposite end.

9. The pressure sensor module of claim 8 wherein the beam is formed of alumina.

10. The pressure sensor module of claim 8, further comprising:

isolation fluid filling the isolation cup; and

an isolator diaphragm having a rim sealed to the isolator cup, the isolator diaphragm being adapted for separating a process fluid from the pressurized isolation fluid.

11. A pressure transmitter, comprising:

an integrally formed beam having a central channel along the beam, the beam having an integral blind end adapted for fluid pressurization and an opposite end shaped to provide a stepped corner with a gap at the base of a stepped corner, where the gap is isolated from the fluid;

a sensing film in the central channel adjacent the blind end, the sensing film having an electrical parameter that varies with pressure, and having electrical leads extending from the channel and out the gap;

a glass frit seal filling the gap around the leads, the glass frit seal filling a portion of the stepped corner; and

an electronic circuit coupled to the leads and providing a transmitter output representative of the sensed pressure.

12. The pressure transmitter of claim 11 wherein the beam is formed of alumina.

13. The transmitter of claim 11, further comprising:

an isolator having a first opening sealed to an outer surface of the beam between the blind end and the opposite end and a second opening sealed with an isolation diaphragm.

14. The transmitter of claim 11 further comprising:

a second beam, second seal and second sensing film coupled to the electronic circuit, the transmitter sensing differential pressure.

15. A turbine engine pressure probe, comprising:

a mounting pedestal having a first end adapted for mounting to a turbine engine housing and having a second end spaced apart from the first end and having an opening shaped to receive a pressure sensor and extending through the mounting pedestal to the first end; and

a pressure sensor, comprising;

a beam disposed in the opening integrally formed around a central channel, the beam having an integral blind end adapted for pressure in an airstream and an opposite end shaped to provide a stepped corner with a gap opening at a base of the stepped corner where the gap is isolated from the airstream;

a sensing film in the central channel adjacent the blind end, the sensing film having an electrical parameter that varies with the pressure, and having electrical leads extending from the channel and out the gap; and

a glass frit seal filling the gap around the leads, the glass frit seal filling a portion of the stepped corner.

16. A pressure sensor, comprising:

first means for providing a sensor body integrally formed around a central channel, the first means having an integral blind end adapted for fluid pressurization and an opposite end shaped to provide a stepped corner with a gap opening at a base of the stepped corner where the gap is isolated from the fluid;

second means for sensing formed in the central channel adjacent the blind end, the second means having an electrical parameter that varies with pressure and electrical leads extending from the channel and out the gap; and

third means for sealing the gap around the leads, the third means filling a portion of the stepped corner.