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Method and apparatus for a direct bonded isolated pressure sensor

  • US 6,520,020 B1
  • Filed: 01/06/2000
  • Issued: 02/18/2003
  • Est. Priority Date: 01/06/2000
  • Status: Expired due to Term
First Claim
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1. A pressure sensor, comprising:

  • a beam integrally formed around a central channel, the beam having an integral blind end adapted for fluid pressurization and an opposite end shaped to provide a stepped corner with a gap opening at a base of the stepped corner where the gap is isolated from the fluid;

    a sensing film in the central channel adjacent the blind end, the sensing film having an electrical parameter that varies with pressure and electrical leads extending from the channel and out the gap; and

    a glass frit seal filling the gap around the leads, the glass frit seal filling a portion of the stepped corner.

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