Micro pump
First Claim
1. A microelectromechanical valve comprising at least two flexible diaphragms in opposed spaced relationship to each other, the diaphragms having offset holes such that fluid flow between the diaphragms is impeded when the diaphragms are in close proximity to one another, and the fluid flow through the diaphragms is enabled when the diaphragms are spaced apart, and an actuator for causing the diaphragms to approach and retract relative to each other.
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Accused Products
Abstract
This invention is directed to a microelectromechanical valve having two or more diaphragms containing non-aligned holes to control the flow of fluids. Fluid flows through the holes in the first diaphragm and then must flow between the first and second diaphragm to reach the holes in the second diaphragm, whereupon the fluid is free to flow past the second diaphragm.
139 Citations
68 Claims
- 1. A microelectromechanical valve comprising at least two flexible diaphragms in opposed spaced relationship to each other, the diaphragms having offset holes such that fluid flow between the diaphragms is impeded when the diaphragms are in close proximity to one another, and the fluid flow through the diaphragms is enabled when the diaphragms are spaced apart, and an actuator for causing the diaphragms to approach and retract relative to each other.
- 6. A microelectromechaincal valve comprising a first diaphragm in spaced opposed relationship to a second diaphragm, the diaphragms being flexible and having offset holes such that fluid flow between the diaphragms is impeded when the diaphragms are in close proximity to one another and fluid flow through the diaphragms is enabled when the diaphragms are spaced apart, and an actuator for causing the diaphragms to approach and retract relative to each other.
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66. A method of controlling fluid flow comprising the steps of:
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providing a first diaphragm having a first conductor and a first set of holes;
providing a second diaphragm having a second conductor and second set of holes that are offset relative to the first set of holes, the second diaphragm being in opposed spaced relation to the first diaphragm to form a channel; and
supplying pressurized fluid to the first diaphragm;
applying a voltage to the diaphragms to generate an electrostatic force which cause the diaphragms to move together in close proximity, wherein the fluid flow through the diaphragm is impeded due to the close proximity of the diaphragms;
supplying pressure between the diaphragms to cause the diaphragms to retract from each other, enabling fluid flow through the diaphragms. - View Dependent Claims (67)
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68. A method of making a diaphragm comprising the steps of:
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providing a wafer having a first surface and a second surface;
oxidizing the wafer and applying a layer of photoresist to the first and second surfaces;
applying a mask to the first and second surfaces and etching away the photoresist from the first and second surfaces to creates a plurality of openings;
diffusing resistant material into the first surface to create an etchant impermeable layer along the first surface;
the first surface only being diffused where the where the photoresist is etched away;
depositing a conductive layer over the layer of photoresist on the first surface;
applying a second layer of photoresist on the conductive layer;
etching the a central region of the wafer and the first surface with an etchant to produce a cavity that extends from the second surface to the interior of the first surface to form a diaphragm having a plurality of holes therein, the diaphragm comprising the conductive layer and the second layer of photoresist.
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Specification