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Ion beam collimating grid to reduce added defects

  • US 6,521,897 B1
  • Filed: 11/17/2000
  • Issued: 02/18/2003
  • Est. Priority Date: 11/17/2000
  • Status: Expired due to Term
First Claim
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1. In an ion beam source, the improvement comprising:

  • a collimating grid which insures that ions of the ion beam hit and are confined to a specific target area, said collimating grid being position in spaced relationship to an exit grid of said ion source, said collimating grid and said exit grid being at the same potential, and said collimating grid being constructed and located with respect to said exit grid to collimate ion beamlets, disallow beam spread, and limit beam divergence during transients and steady state operation.

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