Alternating phase shift mask design conflict resolution

• US 6,523,165 B2
• Filed: 07/13/2001
• Issued: 02/18/2003
• Est. Priority Date: 07/13/2001
• Status: Active Grant

• Current Assignee: Synopsys Incorporated
• Original Assignee: Numerical Technologies Inc. (Synopsys Incorporated)
• Inventors: Richardson, Kent, Pierrat, Christophe, Liu, Hua-Yu
• Primary Examiner(s): Smith, Matthew
• Assistant Examiner(s): DO, THUAN V
• Application Number:
  US09/905,420
• Publication Number:
  US 20030014732A1
• Time in Patent Office: 585 Days
• Field of Search: 716/2, 716/19-21, 435/410
• US Class Current: 716/52
• CPC Class Codes: G03F 1/30 Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof

Abstract

Methods and apparatuses for preparing layouts and masks that use phase shifting to enable production of subwavelength features on an integrated circuit in close (optical) proximity to other structures are described. One embodiment selects from several strategies for resolving conflicts between phase shifters used to define features and (optically) proximate structures that are being defined other than by phase shifting. One embodiment adds additional phase shifters to define the conflicting structures. Another embodiment optically corrects the shape of the phase shifters in proximity to a conflicting structure. Resulting integrated circuits can include a greater number of subwavelength features even in areas that are in close proximity to structures that were not initially identified for production using a phase shifting mask.

Claims

1. A method for producing phase shifting layout data from a portion of an integrated circuit (IC) layout of a layer of material, the method comprising:

identifying a feature in the IC layout for definition with a phase shifting layout using a computer;

generating using a computer the phase shifting layout data using the IC layout, the phase shifting layout data defining phase shifting areas in an opaque field for defining the feature in the material, the phase shifting layout data adapted to be used in conjunction with a second layout data, the second layout data defining other structures in the material, and preventing exposure of the feature, the second layout data corresponding to a trim mask for use in conjunction with a phase shifting mask corresponding to the phase shifting layout data;

determining using a computer if the phase shifting layout data will result in a conflict with other structure in the material; and

modifying the phase shifting layout data to resolve the conflict by adjusting the phase shifting layout to optically correct for the conflict with other structure in the material using a computer.

2. The method of claim 1, wherein the phase shifting layout data defines at least a first light transmissive region having at least one edge, and wherein the modifying comprises replacing the edge with a plurality of edges, each of the plurality of edges a sufficient distance from corresponding edges of conflicting other structure such that the phase shifting layout data no longer results in the conflict with other structure in the material.

3. The method of claim 1, wherein the phase shifting layout data defines at least a first light transmissive region having at least one edge, and wherein the modifying further comprises redefining the first light transmissive region such that the at least one edge of the light transmissive region a sufficient distance from corresponding edges of conflicting other structure such that the phase shifting layout data no longer results in the conflict with other structure in the material.

4. The method of claim 1, wherein λ

is a wavelength of light for use in production of the layer of material and the phase shifting layout data defines at least a first light transmissive region having at least one edge, and wherein the determining further comprises computing for the at least one edge whether it is a predetermined multiple of away from other structure.

5. The method of claim 4, wherein the predetermined multiple of λ

is 0.2.

6. An electromagnetic waveform embodied on a carrier wave, the electromagnetic waveform comprising a computer program for modifying a phase shifting layout data for a portion of an integrated circuit (IC) layout of a layer of material to resolve a conflict between placement of phase shifting areas and structures to be produced other than by phase shifting areas, the phase shifting layout data defining at least a first phase shifting area, the IC layout defining at least a first structure, the computer program further comprising:

a first set of instructions for determining whether there is a conflict between the at least a first phase shifting area and the at least a first structure in the IC layout, the conflict corresponding to whether production of the layer of material using a mask defined by the phase shifting layout would result in exposure of a portion of the at least a first structure, wherein the determining includes simulating optical proximity characteristics of a manufacturing process;

a second set of instructions for further defining the phase shifting layout to include at least a second phase shifting area response to the determining, the at least a second phase shifting area to assist in production of the structure in the layer of material using the phase shifting layout.

7. The electromagnetic waveform of claim 6, wherein the at least a first phase shifting area has a first plurality of edges and wherein the at least a first structure as a second plurality of edges, and wherein the first set of instructions further comprises a set of instructions for analyzing distance between pairs of edges in the first plurality of edges and edges in the second plurality of edges, and determining that the conflict exists if distance between any pair of edges less than a predetermined amount.

8. The electromagnetic waveform of claim 7, wherein the predetermined amount determined from a wavelength of light (λ

) to be used in producing the layer of material.

9. The electromagnetic waveform of claim 6, wherein the phase shifting layout further defining a third phase shifting area, the computer program further comprising a third set of instructions for determining whether there are phase assignment conflicts among the at least a first phase shifting area, the at least a second phase shifting area, and the third phase shifting area.

10. The electromagnetic waveform of claim 9, wherein the computer program further comprises a fourth set of instructions for removing the at least a second phase shifting area from the phase shifting layout responsive to the determining and for modifying one or more of the at least a first phase shifting area, the IC layout, and the phase shifting layout to resolve the conflict identified by the first set of instructions.

11. The electromagnetic waveform of claim 9, wherein the computer program further comprises a fourth set of instructions for assigning same phase to the first phase shifting area and the second phase shifting area responsive to the determining and for modifying the IC layout to upwardly bias the structure.

12. An apparatus for producing phase shifting layout data from a portion of an integrated circuit (IC) layout of a layer of material, the apparatus comprising:

means for identifying a feature in the IC layout for definition with a phase shifting layout;

means for generating the phase shifting layout data using the IC layout, the phase shifting layout data defining phase shifting areas in an opaque field for defining the feature in the material, the phase shifting layout data adapted to be used in conjunction with a second layout data, the second layout data defining other structures in the material, and preventing exposure of the feature, the second layout data corresponding to a trim mask for use in conjunction with a phase shifting mask corresponding to the phase shifting layout data;

means for determining if the phase shifting layout data will result in a conflict with other structure in the material; and

means for modifying the phase shifting layout data to resolve the conflict by adjusting the phase shifting layout to optically correct for the conflict with other structure in the material.

13. The apparatus of claim 12 wherein the means for modifying further comprises means for applying rule-based optical proximity correction (OPC) to the phase shifting layout to correct for the conflict.

14. The apparatus of claim 12 wherein the means for modifying further comprises means for applying model-based optical proximity correction (OPC) to the phase shifting layout to correct for the conflict.

15. The apparatus of claim 12 wherein the means for modifying further comprises means for selecting a conflict resolution strategy from a plurality of strategies for correcting for the conflict.

16. The apparatus of claim 15 wherein the means for selecting further comprises means for accessing a ranking of the plurality of strategies and applying highest ranked strategy that can correct for the conflict.

17. A mask with a plurality of phase shifting areas for use in defining a portion of an IC layout of a layer of material, another portion of the IC layout being defined by a trim mask, the phase shifting areas being defined by the following process:

determining if a first phase shifting area in the plurality of phase shifting areas result in a conflict with structure in the material due to optical proximity effects; and

modifying the first phase shifting area to optically correct for the conflict with structure in the material using a computer.

18. The mask of claim 17, wherein the modifying further comprises applying at least one of rule based OPC and model based OPC to the first phase shifting area to correct for the conflict.

19. The mask of claim 17, wherein the first phase shifting area in conflict with a structure, and the modifying further comprising adding at least one phase shifting area to the mask to define the structure using the mask.

20. A system for defining phase shifting layout data from a portion of an integrated circuit (IC) layout of a layer of material, the system comprising:

a memory, the memory comprising

a layout data for a portion of an IC layout of a layer of material,

a phase shifting layout data,

a first computer program for defining the phase shifting layout data including phase shifting areas in an opaque field to define features in the material,

a second computer program for identifying if the phase shifting layout data will result in a conflict with other structure in the material,

a third computer program for resolving conflicts between phase shifting layout data and other structure in the material, and

a fourth computer program for coordinating operation of the first computer program, the second computer program, and the third computer program on the layout data;

a processor for executing the first computer program, the second computer program, the third computer program, and the fourth computer program.

21. The system of claim 20, wherein the memory further comprises a plurality of computer programs designed for invocation by the third computer program, each of the plurality of computer programs for resolving conflicts between phase shifting layout data and other structure in the material according to a predefined strategy.

22. The system of claim 21, wherein one of the plurality of computer programs comprises a computer program for performing OPC to shape of phase shifting areas in the phase shifting layout data to resolve conflicts between phase shifting layout data and other structure in the material.

23. The system of claim 20, wherein the memory further comprises a fifth computer program for applying optical proximity correction to the layout data and wherein the fourth computer adapted to coordinate execution of the fifth computer program, and wherein the processor further for executing the fifth computer program.

24. The system of claim 23, wherein the fourth computer program invokes the second computer program and the third computer program after execution of the fifth computer program to resolve conflicts between phase shifting areas and other structure introduced by execution of the fifth computer program.

25. The system of claim 23, wherein the fifth computer program designed so as not to introduce further conflicts between phase shifting areas and other structures during the applying of optical proximity correction to the layout data.

26. The system of claim 20, wherein the processor comprises a plurality of processors.