Microcantilever sensor

• US 6,523,392 B2
• Filed: 01/24/2001
• Issued: 02/25/2003
• Est. Priority Date: 01/25/2000
• Status: Expired due to Term

• Current Assignee: Arizona Board of Regents (University of Arizona)
• Original Assignee: Arizona Board of Regents (University of Arizona)
• Inventors: Eastman, Michael P., Porter, Timothy L.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): WIGGINS, JOHN DAVID
• Application Number:
  US09/768,647
• Publication Number:
  US 20030010097A1
• Time in Patent Office: 762 Days
• Field of Search: 73/240.1, 73/240.6, 73/617.2, 73/310.5, 735/80, 735/92, 422/88
• US Class Current: 73/24.01
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 19/10 Measuring moisture content, e.g. by measuring change in length of hygroscopic filament; Hygrometers
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01Q 70/18 Functionalisation

Abstract

An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever formed over and contacting a sensing element. A gaseous or liquid medium which may include the analyte being detected, is introduced to the sensing element. The sensing element undergoes volumetric expansion or contraction in the presence of the analyte sought to be detected, typically by adsorbing the analyte. The volumetric change of the sensing element causes the deflectable arm to deflect. The deflectable arm includes at least one measurable physical property which changes when the arm deflects. Detecting means are provided to measure the change in the physical property to determine the presence and amount of analyte present. An array of microcantilevers in which each microcantilever is dedicated to detecting a particular analyte which may be included in the medium, is also provided.

Claims

1. A microcantilever for detecting at least one analyte in a fluid medium comprising:

a deflectable arm having one end fixedly coupled to a substrate, said arm being a sensing material on disposed in an initially stationary rest position capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm out of said rest position.

2. The microcantilever as in claim 1, wherein said arm includes at least one measurable physical property which changes when said arm deflects and said detecting means is capable of measuring a change in said at least one measurable physical property.

3. The microcantilever as in claim 1, in which said detecting means includes an electric circuit for facilitating measurement of said deflection of said arm.

4. The microcantilever as in claim 1, in which said detecting means includes a transducer capable of transducing said deflection of said arm to a measurable electrical signal.

5. The microcantilever as in claim 1, in which said arm includes a piezoresistive member formed one of therein and thereon and said detecting means includes an electrical circuit capable of measuring a change in resistance of said piezoresistive member due to said deflection.

8. The microcantilever as in claim 1, wherein said sensing element is formed on a surface and said deflectable arm is disposed essentially parallel to said surface when in rest position.

9. The microcantilever as in claim 1, wherein said sensing element comprises a chemical sensor formed of a polymer and which undergoes volumetric expansion in the vertical direction upon exposure to said at least one analyte.

10. The microcantilever as in claim 1, wherein said sensing element comprises a biological sensor formed of layered biological molecules capable of adsorbing said at least one analyte and volumetrically expanding in the vertical direction as a result of said adsorption.

11. The microcantilever as in claim 10, in which said biological sensor comprises antibodies.

12. The microcantilever as in claim 11, in which said at least one analyte comprises a virus attracted to said antibodies.

15. The microcantilever as in claim 1, wherein said sensing element comprises at least one of polyvinyl acetate (PVA), polyisobutylene (PIB), polyethylene vinyl acetate (PEVA), poly(4-vinylphenol), poly(styrene-co-allyl alcohol), poly(methylstyrene), poly(N-vinylpyrrolidone), poly(styrene), poly(sulfone), poly(methyl methacrylate), and poly(ethylene oxide).

16. The microcantilever as in claim 1, in which said sensing element comprises a discrete pad of material formed on a surface.

17. The microcantilever as in claim 1, in which said deflectable arm includes silicon nitride as a component thereof.

18. The microcantilever as in claim 1, in which said at least one analyte is included within one of a gaseous medium and a liquid medium.

19. The microcantilever as in claim 1, in which said deflectable arm includes a thickness ranging from 10 microns to 50 microns, a width ranging from 25 microns to 75 microns, and a length ranging from 100 microns to 200 microns.

20. The microcantilever as in claim 1, in which the opposite end of said arm includes a tip having a pointed portion contacting said subjacent sensing element.

21. The microcantilever as in claim 1, in which said detecting means is capable of measuring the extent of said deflection of said arm.

6. A microcantilever for detecting at least one analyte in a fluid medium comprising:

a deflectable arm having one end fixedly coupled to a substrate, said arm being disposed in a rest position capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm out of said rest position, wherein said arm includes a piezoresistive member formed one of therein and thereon and said detecting means includes an electrical circuit capable of measuring a change in resistance of said piezoresistive member due to said deflection, and wherein said piezoresistive member comprises barium titanate.

7. A microcantilever for detecting at least one analyte in a fluid medium comprising:

a deflectable arm having one end fixedly coupled to a substrate, said arm being disposed in a rest position capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm out of said rest position in which said deflectable arm overhangs an edge of said substrate and said sensing element is disposed on a further substrate.

13. A microcantilever for detecting at least one analyte in a fluid medium comprising:

a deflectable arm having one end fixedly coupled to a substrate, said arm being disposed in a rest position capable of deflecting responsive to a volumetric change of a subjacent sensing element contacting said arm, and detecting means capable of measuring the deflection of said arm out of said rest position wherein said sensing element comprises a biological sensor formed of layered biological molecules capable of adsorbing said at least one analyte and volumetrically expanding in the vertical direction as a result of said adsorption, and in which said biological sensor comprises a thiolated single strand DNA disposed on a gold substrate.

14. The microcantilever as in claim 13, in which said at least one analyte comprises the complementary DNA strand of double-stranded DNA.

22. An array of microcantilevers for detecting analytes, comprising:

a plurality of discrete sensing elements formed on a surface;

a corresponding plurality of deflectable arms each being disposed in a rest position, each having one end fixedly coupled to a substrate and an overhang portion situated superjacent a corresponding sensing element and contacting said corresponding sensing element, each deflectable arm capable of deflecting responsive to a volumetric change in said corresponding sensing element; and

detecting means capable of measuring the deflection of each deflectable arm out of each said rest position.

23. The array of microcantilevers as in claim 22, wherein each sensing element is different from the other sensing elements.

25. The array of microcantilevers as in claim 22, wherein each sensing element of said plurality of discrete sensing elements undergoes a volumetric change in response to the presence of a different analyte.

26. The array of microcantilevers as in claim 22, in which each deflectable arm includes a piezoresistive element one of therein and thereon and said detecting means includes electrical circuitry for measuring a change in resistance of each piezoresistive element as a result of deflection due to volumetric change in said corresponding sensing element.

27. The array of microcantilevers as in claim 22, in which each said deflectable arm includes at least one measurable physical property which changes when said arm deflects and said detecting means is capable of measuring a change in said at least one measurable physical property of each deflectable arm.

28. The array of microcantilevers as in claim 22, in which each said deflectable arm is dedicated to sensing a distinct analyte.

24. An array of microcantilevers for detecting analytes, comprising:

a plurality of discrete sensing elements formed on a surface;

a corresponding plurality of deflectable arms each being disposed in a rest position, each having one end fixedly coupled to a substrate and an overhang portion situated superjacent a corresponding sensing element and contacting said corresponding sensing element, each deflectable arm capable of deflecting responsive to a volumetric change in said corresponding sensing element; and

detecting means capable of measuring the deflection of each deflectable arm out of each said rest position wherein each sensing element is different from the other sensing elements, and in which said deflectable arms each have one end fixedly coupled to a common substrate and said surface is formed on a further substrate situated adjacent said common substrate.

29. A method for detecting an analyte within a fluid medium, comprising:

providing a deflectable microcantilever arm having one end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;

forming a sensing element subjacent said arm and contacting an underside of said arm, said sensing element capable of at least one of vertical swelling and vertical contraction responsive to the presence of said analyte, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;

introducing a fluid medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor; and

measuring said deflection of said microcantilever arm out of said rest position.

31. The method as in claim 29, wherein said microcantilever arm includes a piezoresistive member one of therein and thereon, and said measuring comprises measuring a resistance change of said piezoresistive member as a result of one of said upward deflection and said downward deflection.

32. The method as in claim 31, in which said microcantilever arm includes two conductive leads coupled to said piezoresistive member and said measuring includes measuring resistance across said two conductive leads.

33. The method as in claim 31, in which said measuring includes measuring resistance of said piezoresistive member each of before and after said step of introducing.

34. The method as in claim 31, in which said step of forming said sensing element subjacent said arm includes forming said sensing element on a further substrate and positioning said further substrate adjacent said substrate.

30. A method for detecting an analyte within a fluid medium, comprising:

providing a deflectable microcantilever arm having one end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;

forming a sensing element subjacent said arm and contacting an underside of said arm, said sensing element capable of at least one of vertical swelling and vertical contraction responsive to the presence of said analyte, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;

introducing a fluid medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor; and

measuring said deflection of said microcantilever arm out of said rest position wherein said microcantilever arm includes at least one measurable physical property which changes when said microcantilever arm deflects and said measuring comprises measuring a change in said at least one measurable physical property.