Force sensor
First Claim
1. A force sensor comprising:
- a supporting base having an outer periphery, an inner periphery, and a hollow portion;
a flexible plate having at least one detecting element and extending across the hollow portion; and
an operating member having an outer periphery, an inner periphery, and suspended over the hollow portion by the flexible plate, the thickness of the flexible plate increasing from a position of which mechanical strength is lowest in the flexible plate between the outer periphery of the operating member and the inner periphery of the supporting base toward at least one of the outer periphery of the operating member and the inner periphery of the supporting base.
1 Assignment
0 Petitions
Accused Products
Abstract
A force sensor includes: a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across over the hollow portion, and an operating member suspended over the hollow portion by the flexible plate. Inclined strength is given to the flexible plate so that it becomes stronger from an arbitrary position between the outer periphery of the operating member and the inner periphery of the supporting base toward the outer periphery of the operating member and/or toward the inner periphery of the supporting base. Another force sensor includes: a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across over the hollow portion, and an operating member suspended over the hollow portion by the flexible plate. A boundary between the flexible plate and the operating member and/or a boundary between the flexible plate and the supporting base have (has) a curvature.
35 Citations
33 Claims
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1. A force sensor comprising:
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a supporting base having an outer periphery, an inner periphery, and a hollow portion;
a flexible plate having at least one detecting element and extending across the hollow portion; and
an operating member having an outer periphery, an inner periphery, and suspended over the hollow portion by the flexible plate, the thickness of the flexible plate increasing from a position of which mechanical strength is lowest in the flexible plate between the outer periphery of the operating member and the inner periphery of the supporting base toward at least one of the outer periphery of the operating member and the inner periphery of the supporting base. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A force sensor comprising:
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a supporting base having an outer periphery, an inner periphery, and a hollow portion;
a flexible plate having at least one detecting element and extending across the hollow portion; and
an operating member having an outer periphery, an inner periphery, and suspended over the hollow portion by the flexible plate, the composition of the flexible plate changing from a position of which mechanical strength is lowest in the flexible plate between the outer periphery of the operating member and the inner periphery of the supporting base toward at least one of the outer periphery of the operating member and the inner periphery of the supporting base. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A force sensor comprising:
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a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across the hollow portion, and an operating member suspended over the hollow portion by the flexible plate;
wherein at least one of a boundary between the flexible plate and the operating member and a boundary between the flexible plate and the supporting base has curvature, wherein the curvature of the boundary between the flexible plate and the operating member is different from that of the boundary between the flexible plate and the supporting base. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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27. A force sensor comprising:
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a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across the hollow portion, and an operating member suspended over the hollow portion by the flexible plate;
wherein at least one of a boundary between the flexible plate and the operating member and a boundary between the flexible plate and the supporting base has curvature, and said boundary is formed in tiers. - View Dependent Claims (28, 30, 31, 32, 33)
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29. A force sensor according to clam 27, wherein said operating member, said supporting base, and said flexible plate are unitarily formed, and at least one of them has a different chemical composition from the others.
Specification