Microvalve with pressure equalization
First Claim
1. A microvalve comprising a first layer, a second layer, and a third layer, said second layer being disposed between said first layer and said third layer;
- said first layer having a first port therethrough, said third layer having a second port theretrough, and said second layer having a flow area defined therein and positioned so that a fluid flows through said first port, said flow area, and said second port in the absence of an obstruction to flow;
said second layer having a displaceable member and at least one actuator disposed relative to a first end portion of said member to displace said member in a plane parallel to said second layer, said member being displaceable to selectively and proportionally place a second end portion of said member at a position between an open and a closed position relative to at least one of said first and second ports;
said first layer having a first pressure-equalizing contour in fluid communication with a first face of said second end portion and in fluid communication with said first port;
said third layer having a second pressure-equalizing contour in fluid communication with a second face of said second end portion and in fluid communication with said first port;
and said first and second pressure-equalizing contours each having sufficient depth and length that a fluid filling said first and second pressure-equalizing contours during use provides a pressure force on said first face that counteracts a pressure force on said second face as said second end portion of said member is displaced.
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Accused Products
Abstract
Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an orifice. A pressure-equalizing contour is positioned beneath the displaceable member and is in fluid contact with the inlet port. The pressure on the displaceable member from the inlet port is equalized by the pressure from the pressure-equalizing contour. Consequently, the microvalve can be configured with its inlet port and outlet port on opposite sides of the microvalve. Pressures in the x and y direction are also equalized because of recesses that permit fluid from the inlet to contact all faces of the displaceable member.
192 Citations
35 Claims
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1. A microvalve comprising a first layer, a second layer, and a third layer, said second layer being disposed between said first layer and said third layer;
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said first layer having a first port therethrough, said third layer having a second port theretrough, and said second layer having a flow area defined therein and positioned so that a fluid flows through said first port, said flow area, and said second port in the absence of an obstruction to flow;
said second layer having a displaceable member and at least one actuator disposed relative to a first end portion of said member to displace said member in a plane parallel to said second layer, said member being displaceable to selectively and proportionally place a second end portion of said member at a position between an open and a closed position relative to at least one of said first and second ports;
said first layer having a first pressure-equalizing contour in fluid communication with a first face of said second end portion and in fluid communication with said first port;
said third layer having a second pressure-equalizing contour in fluid communication with a second face of said second end portion and in fluid communication with said first port;
and said first and second pressure-equalizing contours each having sufficient depth and length that a fluid filling said first and second pressure-equalizing contours during use provides a pressure force on said first face that counteracts a pressure force on said second face as said second end portion of said member is displaced. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A microvalve for controlling flow of a fluid, said microvalve comprising a body having an inlet, an outlet, a channel in the body in fluid communication between the inlet and outlet, and a flow controller at least partially positioned within the channel;
- wherein the flow controller comprises a slider having a first face that contacts fluid entering the channel from the inlet and a second face opposite of the first face;
wherein the slider is moved to a position by an actuator;
wherein the body of the microvalve further has a pressure-equalizing contour communicating with the second face of the slider, said pressure-equalizing contour being sufficiently deep that the slider does not contact the bottom of the pressure-equalizing contour as the slider is opened and shut while fluid flows through the microvalve, and wherein said pressure-equalizing contour is in fluid communication with the inlet of the microvalve regardless of the position of the slider. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
- wherein the flow controller comprises a slider having a first face that contacts fluid entering the channel from the inlet and a second face opposite of the first face;
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20. A method of using the pressure of a fluid to provide a microvalve that is capable of operating at high pressure, the method comprising the steps of:
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providing a housing having a first layer, a second layer, a third layer, an inlet and an outlet;
placing the inlet in fluid communication with the outlet via a passage between the inlet and outlet;
providing a slider in the second layer of the housing;
displacing the slider in a plane defined by the second layer to open and close the microvalve;
directing fluid at a lower face of the slider in a direction which has at least a component which is perpendicular to the lower face of the slider;
directing fluid at an upper face of the slider which is opposite of the lower face and in a direction which has at least a component which is perpendicular to the upper face, wherein fluid pressure on the upper and lower faces on the slider is substantially equalized. - View Dependent Claims (21, 22, 23, 24)
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25. microvalve for controlling flow of a fluid and comprising:
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a body having a first layer, a second layer overlaying the first layer, a third layer overlaying the second layer, an inlet, an outlet, and a channel interconnecting the inlet and outlet;
a flow controller at least partially positioned within the channel and having a first face that contacts fluid entering the channel from the inlet and a second face opposite the first face;
an actuator for moving the flow controller in the body in a plane defined by the second layer;
a first pressure-equalizing contour formed in the body and communicating with the first face of the flow controller; and
a second pressure-equalizing contour formed in the body and communicating with the second face of the flow controller, such that fluid filling the first and second pressure-equalizing contours provides pressure equalizing force on the first and second faces, respectively. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification