Non-contact vision based inspection system for flat specular parts

• US 6,525,810 B1
• Filed: 11/11/1999
• Issued: 02/25/2003
• Est. Priority Date: 11/11/1999
• Status: Expired due to Fees

• Current Assignee: Imagexpert Incorporated
• Original Assignee: Imagexpert Incorporated
• Inventors: Kipman, Yair
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US09/438,178
• Time in Patent Office: 1,202 Days
• Field of Search: 356/237.1
• US Class Current: 356/237.1
• CPC Class Codes: G01N 21/88 Investigating the presence of flaws or contamination

Abstract

A non-contact vision based inspection system and method for flat specular parts in which an imaging camera defining an image plane is aimed at a part to be inspected for taking a single image of the part. A staging apparatus is used to move the part relative to the camera until the single image of the part is obtained. The image plane is fixed to remain parallel to the object plane defined by the part as the part moves relative to the imaging camera.

Claims

1. A non-contact vision based inspection system for flat specular parts, the system comprising:

an imaging camera defining an image and configured for taking an image of a part;

a staging apparatus for moving the part relative to the imaging camera until an image of the part is obtained; and

a subsystem for automatically ensuring that the image plane remains parallel to an object plane defined by the part as the part moves relative to the imaging camera while the image of the part is obtained.

2. The system of claim 1 in which the imaging camera is a linescan camera.

3. The system of claim 2 in which the part is located on a translatable table and the imaging camera is fixed in place with respect to the movement of the part and the translation table.

4. The system of claim 3 in which the subsystem for automatically ensuring includes a goniometer between the part and the translation table for rotating the orientation of the part relative to the image plane.

5. The system of claim 1 in which the subsystem for automatically ensuring that the image plane remains parallel to an object plane includes an optical source and a detector for measuring distances between each of two points on the part relative to the image plane, a goniometer on the staging apparatus, and a controller responsive to the optical source, the detector, and the goniometer for adjusting the orientation of the part and of the object plane until the object plane is parallel to the image plane.

6. The system of claim 1 further including a subsystem for automatically adjusting the distance between the image plane relative to the object plane for focusing the imaging camera.

7. The system of claim 1 further including a magazine disposed on the staging apparatus for holding a plurality of long narrow parts to be inspected in sequence.

8. the system of claim 7 which the long narrow parts are ink jet printer nozzle plates.

9. A non-contact vision based inspection system for flat specular parts including ink jet nozzle plates, the system comprising:

a linescan camera defining an imaging plane and aimed at a part to be inspected for taking a single image of the part;

a staging apparatus for moving the part relative to the camera until the single image of the part is obtained;

an optical source and a detector for measuring the distance between two points on the part and the image plane;

a goniometer between the part and the staging apparatus; and

a controller programmed to activate the goniometer in response to the optical source and the detector until the object plane defined by the part is parallel to the image plane.

10. The system of claim 9 further including means for adjusting the height of the linescan camera above the part to focus the linescan camera.

11. The system of claim 9 further including a CCD array camera aimed at the part for locating a terminal end of the part.

12. The system of claim 11 in which the controller is further programmed to activate the staging apparatus to move a terminal end of the part proximate the optical source, to activate the optical source and then again to activate the staging apparatus to move an opposite terminal end of the part proximate the optical source, and to again activate the optical source.

13. A method of inspecting flat specular parts, the method comprising:

placing a part defining an object plane in a spaced relationship with respect to an imaging camera defining an image plane;

automatically adjusting one of the object plane and the image plane until they are parallel to each other; and

moving the imaging camera in a direction parallel to the object plane until a single image of the part is recorded.

14. A method of inspecting flat specular parts including ink jet nozzle plates, the method comprising:

locating an edge of the part;

determining a location of an opposite edge of the part;

calculating a height difference between each of the two edges of the part relative to an image plane defined by a position of a linescan camera;

automatically adjusting the orientation of the part until the height difference between each of the two edges of the part is below a predetermined threshold;

focusing the linescan camera at one edge of the part;

scanning the part with the linescan camera by moving the linescan camera in a direction along the image plane until the full part is imaged with the single image; and

using the image of the part as input to an inspection algorithm to inspect the part for defects.

15. An imaging head for a non-contact vision based inspection system, the imaging head comprising:

an optical housing including a mount for a linescan camera and a 2D CCD array camera;

a light source;

means for directing light from the light source to a part to be inspected;

means for directing light reflected from the part simultaneously to both the linescan camera and the 2D CCD array camera; and

a distance measuring device attached to the housing and configured for measuring the orientation of an image plane as defined by the linescan camera relative to an object plane as defined by the part and configured to inter-operate with a subsystem for automatically adjusting the orientation of the image plane relative to the object plane.

16. The imaging head of claim 15 in which the means for directing light reflected from the part includes a beam splitter in the optical housing positioned to direct light to both the linescan CCD camera and 2D CCD array camera.