Integrated mirror array and circuit device
First Claim
1. An integrated circuit and mirror device, the device comprising:
- a first substrate comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space; and
an input/output circuit coupled to each of the electrodes.
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Accused Products
Abstract
An integrated circuit and mirror device. The device includes a first substrate comprising a plurality of electrode groups, wherein each of the groups comprises a plurality of electrodes. A mirror array is formed on a second substrate. Each of the mirrors on the array has a mirror surface being able to pivot about a point (e.g., fixed point, region) in space. Each of the mirrors has a backside surface operably coupled to one of the electrode groups. A bonding layer mechanically couples the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups. The device also has a drive circuitry coupled to each electrode groups. The drive circuitry is configured to apply a voltage to any one of the electrodes in each of the electrode groups. The drive circuitry is disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space.
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Citations
25 Claims
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1. An integrated circuit and mirror device, the device comprising:
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a first substrate comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space; and
an input/output circuit coupled to each of the electrodes. - View Dependent Claims (2, 3, 6, 7, 8, 9)
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4. An integrated circuit and mirror device, the device comprising:
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a first substrate comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space; and
a sense circuit coupled to each of the electrodes. - View Dependent Claims (20, 21, 22)
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5. An integrated circuit and mirror device, the device comprising:
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a first substrate comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space; and
a multiplexing circuit coupled to the drive circuitry. - View Dependent Claims (23, 24, 25)
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10. An integrated circuit and mirror device, the device comprising:
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a first substrate comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space;
a sense circuit coupled between each of the electrodes and the drive circuitry;
an input/output circuit coupled to the drive circuitry; and
a plurality of pads coupled to the input/output circuit. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. An integrated circuit and mirror device, the device comprising:
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a first substrate comprising a plurality of active switching devices and an overlying layer comprising a plurality of electrode groups, each of the groups comprising a plurality of electrodes, the plurality of active switching devices including a transistor selected from at least a CMOS device, a bipolar device, a BiCMOS device, or an NMOS device;
a mirror array formed on a second substrate, each of the mirrors on the array having a mirror surface being able to pivot about a point in space, each of the mirrors having a backside surface operably coupled to one of the electrode groups;
a bonding layer mechanically coupling the first substrate to the second substrate, whereupon the backside surface of each mirror faces one of the electrode groups;
a drive circuitry coupled to each electrode groups, the drive circuitry being configured to apply a voltage to any one of the electrodes in each of the electrode groups, the drive circuitry being disposed in the first substrate and being adapted to pivot each of the mirror faces about the point in space;
a sense circuit coupled between each of the electrodes and the drive circuitry;
an input/output circuit coupled to the drive circuitry; and
a plurality of pads coupled to the input/output circuit.
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Specification