Micromachined optomechanical switches

• US 6,526,198 B1
• Filed: 01/17/2002
• Issued: 02/25/2003
• Est. Priority Date: 04/20/1998
• Status: Expired due to Fees

• Current Assignee: Crossfiber Inc.
• Original Assignee: Omx Incorporated (Office Depot LLC)
• Inventors: Fan, Li, Wu, Ming C., Husain, Anis
• Primary Examiner(s): Palmer, Phan T. H.
• Application Number:
  US10/053,399
• Time in Patent Office: 404 Days
• Field of Search: 385/18, 385/15-25, 385/83, 385/88-94, 385/147
• US Class Current: 385/18
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

In at least one embodiment, a MEMS optomechanical switch in accordance with the present invention includes a substrate, a signal source capable of transmitting a radiation signal, an electrode coupled to the substrate, and a micromachined plate rotatably coupled to the substrate about a pivot axis. The switch further includes a micromirror having an orientated reflective surface, mounted to the micromachined plate and an electrical source coupled to at least one of the electrode and the micromachined plate.

Claims

1. A MEMS optomechanical switch comprising:

a substrate;

a signal source capable of transmitting a radiation signal;

an electrode coupled to the substrate;

a micromachined plate rotatably coupled to the substrate about a pivot axis;

a micromirror having an orientated reflective surface, the micromirror being mounted to the micromachined plate such that the orientation of the reflective surface relative to the radiation signal is substantially constant as the micromachined plate rotates about the pivot axis; and

an electrical source coupled to at least one of the electrode and the micromachined plate, such that an electrical force can be generated between the electrode and the micromachined plate, and wherein the micromachined plate rotates about the pivot axis due to the generation of the electrical force.

2. The MEMS optomechanical switch of claim 1, wherein the micromachined plate is mechanically hinged to the substrate.

3. The MEMS optomechanical switch of claim 2, wherein the micromachined plate is mechanically hinged to the substrate via a torsion hinge.

4. The MEMS optomechanical switch of claim 1, further comprising a landing electrode positioned to prevent the micromachined plate from contacting at least one of the substrate and the electrode.

5. The MEMS optomechanical switch of claim 4 wherein the landing electrode comprises a buckled beam.

6. The MEMS optomechanical switch of claim 1, wherein the electrical force is an elecrostatic force.

7. The MEMS optomechanical switch of claim 1, wherein the electrical force is a magnetic force.

8. The MEMS optomechanical switch of claim 1, wherein the radiation signal is a beam of light.

9. The MEMS optomechanical switch of claim 1, wherein the radiation signal is a laser light.

10. The MEMS optomechanical switch of claim 1, wherein the reflective surface is substantially along a single plane having a normal to the plane, wherein the radiation signal and the normal to the single plane define a reflective angle, and wherein the reflective angle remains substantially constant as the micromachined plate rotates about the pivot axis.

11. A MEMS optomechanical switch comprising:

a substrate;

an electrode coupled to the substrate;

a micromachined plate rotatably coupled to the substrate about a pivot axis, the micromachined plate and electrode being capable of generating an electrical force therebetween;

a micromirror having an orientated reflective surface, wherein the micromirror is mounted to the micromachined plate; and

a landing electrode positioned to prevent the micromachined plate from contacting at least one of the substrate and the electrode.

12. The MEMS optomechanical switch of claim 11, further comprising a signal source capable of transmitting a radiation signal, and wherein the orientation of the reflective surface relative to the radiation signal is substantially constant as the micromachined plate rotates about the pivot axis.

13. The MEMS optomechanical switch of claim 12, further comprising an electrical source coupled to at least on of the electrode and the micromachined plate, such that an electrical force can be generated between the electrode and the micromachined plate.

14. The MEMS optomechanical switch of claim 13, wherein the micromachined plate rotates about the pivot axis due to the generation of the electrical force.

15. The MEMS optomechanical switch of claim 14, wherein the landing comprises a buckled beam.

16. A MEMS optomechanical switch comprising:

a substrate;

a signal source capable of transmitting a radiation signal;

an electrode coupled to the substrate;

a micromachined plate rotatable coupled to the substrate about a pivot axis;

a micromirror having a reflective surface, the micromirror being mounted to the micromachined plate, wherein the reflective surface is substantially along a single plane having a normal to the plane, wherein the normal to the single plane is substantially aligned with the pivot axis; and

an electrical source coupled to at least on of the electrode and the micromachined plate, such that an electrical force can be generated between the electrode and the micromachined plate, and wherein the micromachined plate rotates about the pivot axis due to the generation of the electrical force.

17. The MEMS optomechanical switch of claim 16, wherein the micromachined plate is mechanically hinged to the substrate.

18. The MEMS optomechanical switch of claim 17, wherein the micromachined plate is mechanically hinged to the substrate via a torsion hinge.

19. The MEMS optomechanical switch of claim 16, further comprising a landing electrode positioned to prevent the micromachined plate from contacting at least one of the substrate and the electrode.

20. The MEMS optomechanical switch of claim 19, wherein the landing electrode comprises a buckled beam.