Process for producing membrane for capacitive vacuum measuring cell

• US 6,528,008 B1
• Filed: 12/22/1998
• Issued: 03/04/2003
• Est. Priority Date: 12/23/1997
• Status: Expired due to Fees

• Current Assignee: INFICON GmbH (Inficon Holding AG)
• Original Assignee: INFICON GmbH (Inficon Holding AG)
• Inventors: Bjoerkman, Per
• Primary Examiner(s): Fiorilla, Christopher A.
• Application Number:
  US09/218,934
• Time in Patent Office: 1,533 Days
• Field of Search: 264/662, 264/605, 264/671, 264/672, 264/673, 264/650, 156/62.2
• US Class Current: 264/650
• CPC Class Codes: G01L 9/0044 Constructional details of non-semiconductive diaphragms
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a ribbon-shaped green body of Al₂O₃, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.

Claims

1. A process for producing a membrane for a capacitive vacuum measuring cell that comprises the following steps:

a. forming a membrane from a substantially pure Al₂O₃ slurry;

b. heating the membrane a first time in a furnace to sinter the membrane;

c. cooling the membrane following step b;

d. heating the membrane a second time to smooth the membrane; and

e. cooling the membrane following step d.

2. A process according to claim 1 including the step of heating the membrane a third time following step e. for smoothing the membrane.

3. A process according to claim 1 wherein the membrane has a sintering temperature, and wherein the step of heating the membrane a second time to smooth the membrane is performed at a temperature that is sufficiently high to soften the membrane but which does not exceed the sintering temperature.

4. A process according to claim 1 wherein the step of heating the membrane a first time is performed at a first temperature;

wherein the step of heating the membrane a second time is performed at a second temperature; and

wherein the first temperature is greater than the second temperature.

5. A process according to claim 1 in which the membrane rests on a flat plate during the second heating step, preferably between two flat plates, and is smoothed, preferably by pressing such as by weight loading.

6. A process according to claim 5 in which the membrane is detached from the plates after the second heating step, redeposited in an offset position upon said flat plate, and subsequently heated a third time following step e. for smoothing the membrane.

7. A process according to claim 5 in which the flat plate is made of a material that has essentially the same temperature coefficient as the membrane material, and in particular, consists of Al₂O₃, wherein the flat plate material is preferably hard sintered and has a higher softening temperature than the membrane.

8. A process according to claim 1 in which the membrane shape is cast or pressed from the Al₂O₃ slurry, preferably from a thin strip of an Al₂O₃ green body supported on a carrier foil, and which is subsequently pulled off the foil.

9. The process recited by claim 1 including the further step of bonding the membrane in a capacitive vacuum measuring cell to enclose a reference vacuum.

10. A process for producing a plurality of membranes for capacitive vacuum measuring cells that comprises the following steps:

a. forming membranes from a substantially pure Al₂O₃ slurry;

b. heating the membranes a first time in a furnace to sinter the membranes;

c. cooling the membranes following step b;

d. heating the membranes a second time to smooth the membranes; and

e. cooling the membranes following step d;

wherein the step of heating the membranes a second time includes the step of stacking a plurality of membranes between flat plates for the purpose of thermal treatment to achieve smoothing.

11. The process recited by claim 10 including the further step of bonding each of the membranes in a capacitive vacuum measuring cell to enclose a reference vacuum.