Electrically programmable photolithography mask

• US 6,528,217 B2
• Filed: 03/28/2002
• Issued: 03/04/2003
• Est. Priority Date: 02/27/1998
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Pierrat, Christophe, Cutter, Douglas J.
• Primary Examiner(s): Rosasco, S.
• Application Number:
  US10/109,757
• Publication Number:
  US 20020098424A1
• Time in Patent Office: 341 Days
• Field of Search: 430/5, 430/322, 250/492.22, 250/492.1, 345/43
• US Class Current: 430/5
• CPC Class Codes: G03F 1/26 Phase shift masks [PSM]; PSM blanks; Preparation thereof
• CPC Class Codes: G03F 1/30 Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
• CPC Class Codes: G03F 1/32 Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion,; Preparation thereof
• CPC Class Codes: G03F 1/34 Phase-edge PSM, e.g. chromeless PSM; Preparation thereof
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

An electronically programmed mask is connected to an electronic device, such as a processor. In operation, a mask design is first entered into the processor. The processor controls a display of an image on the electronically programmed mask, wherein the display replicates conventional type masks. The electronically programmed mask is designed such that the display presented on its screen provides optical contrast and characteristics that are easily changed or reprogrammed by the processor. Electronically controlled masks provide the same patterns as mechanical type masks without requiring rigid, permanent type structures to form a desired pattern.

Claims

1. A method of programming an electronically programmable mask, the method comprising:

creating a first region of the electronically programmable mask which allows for approximately 100% transmission of light from a light source;

creating a second region of the electronically programmable mask that allows a lesser percentage of light from the light source than the first region, such that a phase of light passing through the second region is approximately 180 degrees out-of-phase with light passing through the first region;

creating a third region of the electronically programmable mask that allows a lesser percentage of light from the light source than the first region, such that a phase of light passing through the third region is approximately 180 degrees out-of-phase with light passing through the first region; and

transmitting light through the electronically programmable mask from the light source.

2. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light; and

creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light is phase shifted approximately 180 degrees between the first region and the second region.

3. The method of claim 2, further including creating a third region of the electronically programmable mask which allows transmission of light, such that transmission of light through the third region is a lesser percentage than the transmission of light through the first region and such that the transmission of light is phase shifted between the first region and the third region.

4. The method of claim 3, wherein creating the third region includes creating a third region of the electronically programmable mask such that the third region blocks approximately 100% of light.

5. The method of claim 3, wherein creating the third region includes creating a third region of the electronically programmable mask such that the third region blocks approximately 10% of light.

6. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light; and

creating a second region of the electronically programmable mask which allows transmission of light, such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region and such that the transmission of light is phase shifted between the first region and the second region.

7. The method of claim 6, wherein creating the second region includes creating a second region of the electronically programmable mask such that transmission of light through the second region is a approximately 10% of the transmission of light through the first region.

8. The method of claim 6, wherein creating the second region includes creating a second region of the electronically programmable mask such that the second region blocks approximately 100% of light.

9. The method of claim 6, wherein creating the second region includes creating a second region of the electronically programmable mask such that the transmission of light is phase shifted approximately 180 degrees between the first region and the second region.

10. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light; and

creating a second region of the electronically programmable mask which allows transmission of light, such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region and such that the transmission of light is phase shifted approximately 180 degrees between the first region and the second region.

11. The method of claim 10, wherein creating the second region includes creating a second region of the electronically programmable mask such that transmission of light through the second region is a approximately 10% of the transmission of light through the first region.

12. The method of claim 10, wherein creating the second region includes creating a second region of the electronically programmable mask such that the second region blocks approximately 100% of light.

13. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light;

creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is phase shifted between the first region and the second region; and

creating a third region of the electronically programmable mask such that transmission of light through the third region is a lesser percentage than the transmission of light through the first region.

14. The method of claim 13, wherein creating the first and second regions include creating a second region such that the transmission of light through the second region is approximately 180 degrees out-of-phase with the transmission of light through the first region.

15. The method of claim 13, wherein creating the third region includes creating a third region of the electronically programmable mask such that transmission of light through the third region is a approximately 10% of the transmission of light through the first region.

16. The method of claim 13, wherein creating the third region includes creating a third region of the electronically programmable mask such that the third region blocks approximately 100% of light.

17. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light;

creating a second region of the electronically programmable mask which allows transmission of light, such that the transmission of light through the second region is phase shifted approximately 180 degrees between the first region and the second region; and

creating a third region of the electronically programmable mask that blocks approximately 100% of light.

18. A method for programming an electronically programmable mask, comprising:

creating a first region of the electronically programmable mask which allows transmission of light;

creating a second region of the electronically programmable mask which allows transmission of light, such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region and such that the transmission of light is phase shifted between the first region and the second region; and

creating a third region of the electronically programmable mask that blocks approximately 100% of light.

19. The method of claim 18, wherein creating the second region includes creating a second region of the electronically programmable mask such that transmission of light through the second region is a approximately 10% of the transmission of light through the first region.

20. The method of claim 18, wherein creating the second region includes creating a second region of the electronically programmable mask such that the second region blocks approximately 100% of light.

21. The method of claim 18, wherein creating the second region includes creating a second region of the electronically programmable mask such that the transmission of light is phase shifted approximately 180 degrees between the first region and the second region.

22. A method for programming an electronically programmable mask, comprising:

creating a first layer of the electronically programmable mask, including;

creating a first region that allows transmission of light from a light source; and

creating a second region that allows transmission of light from the light source, such that the transmission of light through the second region is phase shifted between the first region and the second region; and

creating a second layer of the electronically programmable mask, including;

creating a first region that allows transmission of light from the light source; and

creating a second region such that transmission of light through the second region is a lesser percentage than the transmission of light through the first region.

23. The method of claim 22, wherein creating the second region of the first layer includes creating a second region of the electronically programmable mask such that the transmission of light is phase shifted approximately 180 degrees between the first region and the second region.

24. The method of claim 22, wherein creating the second region of the second layer includes creating a second region of the electronically programmable mask such that transmission of light through the second region is a approximately 10% of the transmission of light through the first region.

25. The method of claim 22, wherein creating the second region of the second layer includes creating a second region of the electronically programmable mask such that the second region blocks approximately 100% of light.