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Optical transparent film and sputtering target for forming optical transparent film

  • US 6,528,442 B1
  • Filed: 12/07/2000
  • Issued: 03/04/2003
  • Est. Priority Date: 01/12/1999
  • Status: Expired due to Term
First Claim
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1. An optically transparent film, comprising:

  • 0.01 to 20% by weight of at least one glass forming oxide including P2O5;

    0.01 to 20% by weight of one of Al2O3 and Ga2O3, and a balance being ZnO.

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