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Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications

  • US 6,528,767 B2
  • Filed: 09/24/2001
  • Issued: 03/04/2003
  • Est. Priority Date: 05/22/2001
  • Status: Expired due to Term
First Claim
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1. An apparatus for supporting a glass substrate, comprising:

  • a support element;

    a plurality of support members disposed on the support element, at least one of the support members comprising;

    a base structural member coupled to the support element; and

    a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element; and

    a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.

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