Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications

• US 6,528,767 B2
• Filed: 09/24/2001
• Issued: 03/04/2003
• Est. Priority Date: 05/22/2001
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wolgast, Stephen C., Ramirez, Ericka M., Bagley, William A.
• Primary Examiner(s): Walberg, Teresa
• Assistant Examiner(s): Fuqua, Shawntina T.
• Application Number:
  US09/963,020
• Publication Number:
  US 20020175160A1
• Time in Patent Office: 526 Days
• Field of Search: 219/390, 219/405, 219/411, 392/416, 392/418, 118/724, 118/725, 118/728, 118/50.1
• US Class Current: 219/390
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H01L 21/68778 characterised by supporting substrates others than wafers, e.g. chips

Abstract

An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.

Claims

1. An apparatus for supporting a glass substrate, comprising:

a support element;

a plurality of support members disposed on the support element, at least one of the support members comprising;

a base structural member coupled to the support element; and

a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element; and

a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.

2. The apparatus of claim 1, wherein the rounded top portion has a surface roughness of 4 micro inches or smoother.

3. The apparatus of claim 1, wherein the rounded top portion further comprises a hemispherical, conical, ellip soidal or parabolic end.

4. The apparatus of claim 1, wherein the base structural member is hollow and receives at least a portion of the mounting pin.

5. The apparatus of claim 1, wherein the plurality of support members further comprises:

a first set of support members disposed along at least a portion of a perimeter of the support element; and

at least a second set of support members comprising at least one support member disposed inward of the first set.

6. The apparatus of claim 1, wherein at least one of the support members comprises a non-metallic material.

7. The apparatus of claim 6, wherein at least one of the support members comprises quartz or sapphire.

8. The apparatus of claim 1, wherein at least one of the support members comprises stainless steel or nickel alloy.

9. The apparatus of claim 1, wherein at least one of the support members further comprises a coating.

10. The apparatus of claim 9, wherein the coating is a nitride layer.

11. The apparatus of claim 10, wherein the rounded top portion has a surface roughness of 4 micro inches or smoother.

12. The apparatus of claim 9, wherein the coating has a surface roughness of 4 micro inches or smoother.

13. The apparatus of claim 1, wherein the support element is a shelf.

14. An apparatus for supporting a glass substrate, comprising:

a shelf;

a plurality of support members disposed on the shelf, at least one of the support members comprising;

a base structural member coupled to the shelf;

a top portion adapted to support the glass substrate in a spaced-apart relation to the shelf;

a coating disposed on at least a tip of the top portion; and

a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.

15. The apparatus of claim 14, wherein the top portion has a surface roughness of 4 micro inches or smoother.

16. The apparatus of claim 14, wherein the top portion further comprises a hemispherical, conical, ellipsoidal or parabolic end.

17. The apparatus of claim 14, wherein the top portion further comprises a flat center portion.

18. The apparatus of claim 14, wherein the base structural member is hollow and receives at least a portion of the mounting pin.

19. The apparatus of claim 14, wherein the plurality of support members further comprises:

a first set of support members disposed along at least a portion of a perimeter of the shelf; and

at least a second set of support members comprising at least one support member disposed inward of the first set.

20. The apparatus of claim 14, wherein at least one of the support members comprises a non-metallic material.

21. The apparatus of claim 14, wherein at least one of the support members comprises quartz or sapphire.

22. The apparatus of claim 14, wherein at least one of the support members comprises stainless steel or nickel alloy.

23. The apparatus of claim 14, wherein the coating is a nitride layer.

24. The apparatus of claim 14, wherein the coating has a surface roughness of 4 micro inches or smoother.

25. An apparatus for supporting a glass substrate, comprising:

a chamber;

a plurality of shelves disposed in a spaced-apart relation in the chamber, each shelf having a plurality of support members disposed thereon, at least one of the support members comprising;

a base structural member coupled to the shelf; and

a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the shelf; and

a plurality of mounting pins coupled to each shelf, each pin engaged with a respective support member.

26. The apparatus of claim 25, wherein the chamber further comprises:

at least one sidewall having a resistive heat or conduit for flowing a heat transfer fluid.

27. The apparatus of claim 25, wherein the rounded top portion has a surface roughness of 4 micro inches or smoother.

28. The apparatus of claim 25, wherein the rounded top portion further comprises a hemispherical, conical ellipsoidal or parabolic end.

29. The apparatus of claim 25, wherein the base structural member is hollow and receives at least a portion of the mounting pin.

30. The apparatus of claim 25, wherein the plurality of support member further comprises:

a first set of support members disposed along at least a portion of a perimeter of the shelf; and

at least a second set of support members comprising at least one support member disposed inward of the first set.

31. The apparatus of claim 25, wherein the at least one of the support members comprises non-metallic material.

32. The apparatus of claim 25, wherein the at least one of the support members comprises quartz or sapphire.

33. The apparatus of claim 25, wherein the at least one of the support members comprises stainless steel or nickel alloy.

34. The apparatus of claim 25, wherein the at least one of the support members further comprises:

a coating.

35. The apparatus of claim 34, wherein the coating is a nitride layer.

36. The apparatus of claim 34, wherein the rounded top portion has a surface roughness of 4 micro inches or smoother.

37. The apparatus of claim 34, wherein the coating has a surface roughness of 4 micro inches or smoother.

38. Apparatus for supporting a glass substrate, comprising:

a chamber body having a least one sidewall;

a plurality of support elements coupled to the sidewall;

a first slit valve selectively sealing a first glass transfer port disposed in the chamber body; and

a second slit valve selectively sealing a second glass transfer port disposed in the chamber body;

a plurality of support members disposed on the support elements, where at least one of the support members comprises;

a base structural member coupled to the support elements; and

a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element; and

a plurality of mounting pins coupled to the support element, each pin engaged with a respective support member.

39. An apparatus for supporting a glass substrate, comprising:

a support element;

a plurality of mounting pins coupled to the support element;

a plurality of support members disposed on the mounting pins, at least one of the support members comprising;

a hollow base portion adapted to receive at least a portion of the mounting pin; and

a rounded top portion adapted to support the glass substrate in a spaced-apart relation to the support element.

40. The apparatus of claim 39, wherein the rounded top portion has a surface roughness of 4 micro inches or smoother.

41. The apparatus of claim 39, wherein at least one of the support members comprises quartz or sapphire.

42. The apparatus of claim 39, wherein at least one of the support members comprises stainless steel or nickel alloy.

43. The apparatus of claim 39, wherein at least one of the support members is coated with a nitride layer.