Scanning electron microscope

• US 6,528,787 B2
• Filed: 11/30/2000
• Issued: 03/04/2003
• Est. Priority Date: 11/30/1999
• Status: Expired due to Term

• Current Assignee: JEOL Engineering Company Limited (JEOL Limited), JEOL Limited
• Original Assignee: JEOL Engineering Company Limited (JEOL Limited), JEOL Limited
• Inventors: Katagami, Masumi, Kaneyama, Miyuki
• Primary Examiner(s): Anderson, Bruce
• Assistant Examiner(s): Wells, Nikita
• Application Number:
  US09/727,357
• Publication Number:
  US 20010022346A1
• Time in Patent Office: 824 Days
• Field of Search: 250/310, 250/492.2, 250/492.22, 250/492.3, 250/396.R, 250/398
• US Class Current: 250/310
• CPC Class Codes: H01J 2237/226 Image reconstruction
• CPC Class Codes: H01J 2237/2807 X-rays
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A scanning electron microscope capable of imaging a specimen at a magnification lower than the minimum magnification of the microscope. The specimen surface is virtually partitioned into cells. The specimen is so moved that the cells can be individually scanned by the electron beam and hence image data can be taken from each cell. Image data derived from each cell by the scan is stored in locations of an image memory that are addressed corresponding to the positions of the cells.

Claims

1. A scanning electron microscope having a means for directing a sharply focused electron beam onto a specimen, a means for scanning said electron beam across the specimen in two dimensions, an image memory for storing image data obtained from the specimen by the scanning, a display means for displaying a specimen image based on the image data stored in said image memory, and a motor-driven specimen-moving device, said scanning electron microscope comprising:

means for controlling the specimen-moving device virtually partitioning an area on the specimen to be scanned by the electron beam and from which an image may be taken into virtual cells defined by virtual grid lines and for moving said specimen to scan the cells individually by the electron beam;

an image-synthesizing means for storing image data obtained from said virtual cells in locations of the image memory that are addressed corresponding to said virtual cells, thus creating data defining a synthesized image;

a specifying means permitting an operator to specify an arbitrary area in the synthesized image displayed on the display means according to the data about the synthesized image; and

a partial image display means for reading image data about the area specified by the operator from said image memory and displaying the image data as a partial image.

2. The scanning electron microscope of claim 1, wherein said means for controlling the specimen-moving device moves said specimen such that adjacent ones of said virtual cells are successively scanned by the electron beam.

3. The scanning electron microscope of claim 1 or 2, further comprising a microscope magnification-setting means and wherein said means for controlling the specimen-moving device moves said specimen according to a cell size found based on a magnification set by a microscope magnification-setting means.

4. The scanning electron microscope of claim 1 or 2, wherein the display means may be controlled to simultaneously display said synthesized image and said partial image simultaneously on the viewing screen of a display device.

5. The scanning electron microscope of claim 1 or 2, wherein said specifying means is a rectangular cursor of variable size.

6. The scanning electron microscope of claim 1 or 2, wherein said image-synthesizing means deletes data about image lying outside an image acceptance region from image data obtained from said area scanned by the electron beam and synthesizes an image.

7. The scanning electron microscope of claim 6, further comprising a means for specifying a ratio of said image acceptance region to the area scanned by said electron beam.

8. The scanning electron microscope of claim 1 or 2, wherein:

(A) there is further provided a cell-specifying means permitting an operator to specify a desired one of said virtual cells;

(B) said specimen motion control means controls movement of the specimen such that the cell specified by said cell-specifying means is scanned by the electron beam; and

(C) said image-synthesizing means stores image data obtained from this cell in a location of the image memory that is addressed corresponding to the virtual cell, thus creating data about a synthesized image.

9. The scanning electron microscope of claim 8, further comprising:

a comparison means for comparing image data obtained by scanning the virtual cell specified by said cell-specifying means after the specimen is moved by the specimen motion control means with image data already obtained from the same cell and finding misregistration, if any, between the two images; and

a means for correcting the position of the area on the specimen scanned with the electron beam according to information about the misregistration obtained from said comparison means.

10. The scanning electron microscope of claim 9, wherein said image data is obtained by detecting any one of secondary electrons, reflected electrons, and characteristic X-rays produced from the specimen.

11. A scanning electron microscope comprising:

a means for directing a sharply focused electron beam onto a specimen;

a means for scanning the electron beam across the specimen in two dimensions to produce charged particles and X-rays;

a charged-particle detector for detecting said produced charged particles;

an X-ray detector for detecting said produced characteristic X-rays;

a first image memory for storing image data derived from said charged-particle detector during the scanning of the electron beam;

a second image memory for storing data about an X-ray map of a certain element based on an output signal from the X-ray detector during the scanning of the electron beam;

a display means for displaying at least one of image data stored in the first image memory and X-ray map data stored in the second image memory as an observable still image;

a motor-driven specimen-moving device;

means for controlling the specimen-moving device virtually partitioning an area on the specimen to be scanned by the electron beam and from which an image may be taken into virtual cells defined by virtual grid lines and for moving the specimen such that the cells can be individually scanned by the electron beam;

an image-synthesizing means for storing image data obtained from said virtual cells by the charged-particle detector in locations of the first image memory that are addressed corresponding to said virtual cells, thus creating data defining a synthesized image, said image-synthesizing means acting also to store map data about a certain element obtained from these cells by the X-ray detector in locations of the second image memory that are addressed, thus creating data about a synthesized X-ray map; and

a display means to which data about the synthesized image and the data about the synthesized X-ray map can be supplied.

12. The scanning electron microscope of claim 11, further comprising:

a specifying means permitting an operator to specify a desired region within the synthesized image displayed on said display means based on said synthesized image data or synthesized X-ray map data; and

a means for reading the synthesized image data or synthesized X-ray map data corresponding to the specified region within said synthesized image from said first image memory or said second image memory and displaying the data as a partial image.

13. The scanning electron microscope of claim 11, further comprising:

a specifying means permitting an operator to specify a desired region with the synthesized image displayed on said display means based on said synthesized image data; and

a means for reading the synthesized image data or synthesized X-ray map data corresponding to the specified region within said synthesized image from said first image memory or said second image memory and displaying the data as a partial image.

14. The scanning electron microscope of claim 11 or 12, wherein:

(A) there is further provided a specifying means permitting an operator to specify a desired one of said cells and to specify whether measurements of charged particles and characteristic X-rays from the specified cell are necessary;

(B) said specimen motion control means controls movement of the specimen such that the cell specified by said specifying means is scanned by the electron beam; and

(C) said image-synthesizing means stores at least one of image data and X-ray map data obtained from this cell by the measurements specified by the specifying means in locations of the image memory that are addressed corresponding to the cell, thus creating data about at least one of synthesized image and synthesized map.

15. The scanning electron microscope of claim 14, further comprising:

a comparison means for comparing image data obtained by scanning the virtual cell specified by said specifying means after the specimen is moved by the specimen motion control means with image data already obtained from the same cell and for finding misregistration, if any, between the two images; and

a means for correcting the position of the area on the specimen scanned with the electron beam according to information about the misregistration obtained from said comparison means.

16. The scanning electron microscope of claim 15, wherein said charged particles are secondary electrons or reflected electrons.