Infrared spectrophotometer employing sweep diffraction grating

• US 6,528,791 B1
• Filed: 10/13/2000
• Issued: 03/04/2003
• Est. Priority Date: 10/13/2000
• Status: Expired due to Term

• Current Assignee: LumaSense Technologies Holdings, Inc. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Andros, Inc. (Advanced Energy Industries, Inc. (China))
• Inventors: Kurtz, Joseph John, Williams, Kevin G.
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): Gabor, Otilia
• Application Number:
  US09/688,054
• Time in Patent Office: 872 Days
• Field of Search: 250/339.13, 250/339.08, 250/339.11, 250/338.1, 250/338.5, 250/343, 250/458.1, 356/39, 356/318, 356/301, 356/328, 356/334, 356/437, 356/454, 600/322
• US Class Current: 250/339.13
• CPC Class Codes: G01J 2003/1204 Grating and filter
• CPC Class Codes: G01J 3/06 Scanning arrangements arrangements for order-selection
• CPC Class Codes: G01J 3/18 using diffraction elements, e.g. grating gratings per se G02B
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis

Abstract

Very generally, the gas analyzer of the invention includes a source of infrared energy, a sample cell for containing an analyte gas mixture positioned in the path of infrared energy, and a monochrometer including a movable diffraction grating for producing a beam of infrared energy wherein the constituent wavelengths are spetrally separated. The device also includes a wide band interference filter for transmitting a predetermined wavelength band spanning the characteristic absorption wavelength of each of a plurality of constituent gases in the analyte gas mixture. A detector positioned to receive radiation passing through the filter produces an electrical response related to the infrared energy impinging thereon. The monochrometer includes provision for moving the diffraction grating to sequentially cause infrared energy of different wavelengths to impinge upon the detector, and for intermittently causing infrared energy directed toward the detector from the source to be blocked by the interference filter.

Claims

1. A gas analyzer comprising a source of infrared energy, a sample cell for containing an analyte gas mixture positioned in the path of infrared energy,

a monochromator including a movable diffraction grating for producing a beam of infrared energy wherein the constituent wavelengths are separated spectrally,

a wide band interference filter for transmitting a predetermined wavelength band spanning the characteristic absorption wavelength of each of a plurality of constituent gases in the analyte gas mixture,

a detector positioned to receive radiation passing through said filter to produce an electrical response related to the infrared energy impinging thereon,

said monochromator including provision for moving said diffraction grating to sequentially cause infrared energy of different wavelengths to impinge upon said detector and for intermittently causing infrared energy that would otherwise reach said detector from said source to be blocked by said interference filter, and thereby facilitating span stability.

2. An infrared gas analyzer according to claim 1 wherein said diffraction grating comprises a diffraction grating mirror.

3. A gas analyzer according to claim 1 wherein the area of said detector which is responsive to infrared energy is selected to correspond with a predetermined bandwidth.

4. A gas analyzer comprising a source of infrared energy,

a sample cell for containing an analyte gas mixture positioned in the path of infrared energy,

a monochromator including a movable diffraction grating for producing a beam of unmodulated infrared energy wherein the constituent wavelengths are separated spectrally,

a wide band interference filter for transmitting a predetermined wavelength band spanning the characteristic absorption wavelength of each of a plurality of constituent gases in the analyte gas mixture,

a detector positioned to receive radiation passing through said filter to produce an electrical response related to the infrared energy impinging thereon,

said monochromator including provision for moving said diffraction grating to sequentially cause infrared energy of different wavelengths to impinge upon said detector and for intermittently causing infrared energy directed toward said detector from said source to be blocked by said interference filter.