Deflectable spatial light modulator having superimposed hinge and deflectable element
First Claim
1. A spatial light modulator, comprising in cross section, from top to bottom:
- an optically transmissive substrate;
a first gap below the optically transmissive substrate;
a deflectable element below the first gap;
a second gap below the deflectable element; and
a hinge below the second gap.
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Accused Products
Abstract
A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.
159 Citations
99 Claims
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1. A spatial light modulator, comprising in cross section, from top to bottom:
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an optically transmissive substrate;
a first gap below the optically transmissive substrate;
a deflectable element below the first gap;
a second gap below the deflectable element; and
a hinge below the second gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 84)
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17. A spatial light modulator, comprising:
an optically transmissive substrate having thereon a deflectable element, the deflectable element comprising a hinge which is disposed on a side of the deflectable element opposite to that of the optically transmissive substrate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A spatial light modulator comprising:
an optically transmissive substrate which holds on a bottom surface thereof at least one deflectable element via a corresponding at least one torsion hinge, the deflectable element having top and bottom planar surfaces and one or more edges therebetween, the at least one torsion hinge connected to the deflectable element towards a center part of the bottom surface of the deflectable element.
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40. A spatial light modulator, comprising:
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an optically transmissive substrate having a top surface and a bottom surface;
a deflectable element having a top surface, a bottom surface and one or more edge surfaces; and
a hinge;
wherein the hinge is connected to the optically transmissive substrate only on the bottom surface of the optically transmissive substrate, and wherein the hinge is connected to the deflectable element only on the bottom surface of the deflectable element. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
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62. A spatial light modulator, comprising:
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an optically transmissive substrate extending in a plane substantially horizontally;
a deflectable element extending in a plane substantially horizontally and spaced apart from and substantially parallel to the optically transparent substrate; and
a connector that allows for deflectable connection of the deflectable element to the optically transparent substrate;
wherein the connector comprises a first end attached to the optically transparent substrate, a vertical portion extending from the first end and past the plane of the deflectable element, a hinge portion extending in a plane substantially parallel to and spaced apart from the deflectable element, and a second end connecting the hinge portion to the deflectable element. - View Dependent Claims (63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83)
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85. A method comprising the acts of:
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providing a substrate;
forming a first sacrificial layer above the transparent substrate;
forming a deflectable element layer above the first sacrificial layer;
forming a second sacrificial layer above the deflectable element layer;
forming a hinge above the second sacrificial layer; and
removing the first and second sacrificial layers. - View Dependent Claims (86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99)
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Specification