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Fast wavelength correction technique for a laser

  • US 6,529,531 B1
  • Filed: 06/19/2000
  • Issued: 03/04/2003
  • Est. Priority Date: 07/22/1997
  • Status: Expired due to Term
First Claim
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1. An electric discharge laser with active wavelength chirp mitigation comprising:

  • A) a laser chamber, B) an elongated electrode structure enclosed within said chamber comprising an elongated anode and an elongated cathode separated by comprising an elongated anode and an elongated cathode separated by a distance defining a discharge region, said discharge region defining a long dimension in a beam direction, C) a laser gas contained in said chamber, D) a fan for circulating said laser gas within said chamber and through said discharge region, and E) an active chirp mitigation means, for mitigating wavelength chirp comprising;

    1) a fast wavelength detection means, 2) a fast wavelength control means including a tuning mirror driven by a piezoelectric drive, 3) a feedback circuit means providing feedback control having a response time of less than 10 millisecond, and 4) a tuning mirror adjusting means for adjusting positions of said tuning mirror in advance of a burst of pulses said adjusting means comprising a processor programmed with a learning algorithm for learning shapes of chirps occurring early in a burst of pulses.

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