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Method of making a coated article including DLC and FAS

  • US 6,531,182 B2
  • Filed: 06/20/2001
  • Issued: 03/11/2003
  • Est. Priority Date: 05/03/1999
  • Status: Expired due to Fees
First Claim
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1. A method of making a coated article, the method comprising:

  • providing a substrate;

    depositing a first DLC inclusive layer on the substrate using a first gas including silicon (Si);

    depositing a second DLC inclusive layer on the substrate over the first DLC inclusive layer using a second gas different than the first gas; and

    applying a FAS inclusive layer over said second DLC inclusive layer.

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