3-D lead inspection

• US 6,532,063 B1
• Filed: 11/10/2000
• Issued: 03/11/2003
• Est. Priority Date: 11/10/2000
• Status: Active Grant

• Current Assignee: ASTI Holdings Limited
• Original Assignee: Semiconductor Technologies & Instruments Incorporated (Onto Innovation Inc.)
• Inventors: Tan, Seow Hoon, Rao, Sreenivas
• Primary Examiner(s): STAFIRA, MICHAEL PATRICK
• Application Number:
  US09/710,448
• Time in Patent Office: 851 Days
• Field of Search: 356/237.1, 356/240.1, 356/614, 356/615, 356/622, 250/559.08, 250/559.34, 382/145, 382/146, 382/147, 382/148, 382/149, 382/150, 382/151, 382/260
• US Class Current: 356/237.1
• CPC Class Codes: G01N 2021/95661 for leads, e.g. position, curvature
• CPC Class Codes: G01N 21/95684 Patterns showing highly reflecting parts, e.g. metallic elements

Abstract

A semiconductor lead inspection device includes a camera and an illumination source for backlighting the leads of the semiconductor device to form an image in the camera. The camera and the illumination device are arranged on optical paths which alternatively pass through or are reflected by a beamsplitter. A surface is illuminated to backlight the leads and a light deflecting device is arranged for deflecting the backlit image of the semiconductor leads to form an image in the camera.

Claims

1. Apparatus for optically inspecting connector pins of a semiconductor device, comprising:

a light source for providing illumination along a first optical path;

an optical beamsplitter in said first optical path;

a camera arranged to receive light from said beamsplitter along a second optical path generally transverse from said first optical path;

an inspection station arranged to receive a semiconductor device;

a surface for receiving illumination from said light source and arranged on one side of pins of a semiconductor device at said inspection station; and

at least one light deflecting device on the other side of said pins from said surface for directing a backlight image of said pins toward said beamsplitter to cause said beamsplitter to direct said light to said camera along said second optical path.

2. Apparatus as specified in claim 1 wherein said inspection station comprises a horizontal platform for receiving said semiconductor device and wherein said surface comprises an angled reflecting surface arranged below said horizontal platform.

3. Apparatus as specified in claim 2 wherein said light deflecting devices comprises a mirror.

4. Apparatus as specified in claim 1 for inspecting a semiconductor device having two rows of connector pins and including two of said surfaces to backlight said two rows of connector pins and two of said deflecting devices for deflecting light toward said beamsplitter.

5. Apparatus as specified in claim 1 for inspecting a semiconductor device having four rows of connector pins and including four of said surfaces to backlight said four rows of connector pins and four of said light deflecting devices for deflecting light toward said beamsplitter.

6. Apparatus for optically inspecting connector pins of a semiconductor device comprising:

a light source for providing illumination along a first optical path;

a beamsplitter arranged for deflecting illuminating light from said first optical path to a second optical path generally transverse to said first optical path;

a camera arranged to receive light passing through said beamsplitter along a third optical path generally transverse to said first optical path;

an inspection station arranged to receive a semiconductor device;

at least one surface for receiving illumination from said light source and arranged on one side of connector pins of a semiconductor device received at said inspection station; and

at least one light deflecting device on the other side of said pins from said surface for directing a backlight image of said pins toward said beamsplitter.

7. Apparatus as specified in claim 6 wherein said inspection station comprises a horizontal platform for receiving said semiconductor device and wherein said surface comprises an angled reflecting surface arranged below said horizontal platform.

8. Apparatus as specified in claim 7 wherein said second light deflecting devices comprises a mirror.

9. Apparatus as specified in claim 6 for inspecting a semiconductor device having two rows of connector pins and including two of said surfaces to backlight said two rows of connector pins and two of said light deflecting devices for deflecting light toward said beamsplitter.

10. Apparatus as specified in claim 6 for inspecting a semiconductor device having four rows of connector pins and including four of said surfaces to backlight said four rows of connector pins and four of said light deflecting devices for deflecting light toward said beamsplitter.

11. A method for inspecting connector pins of a semiconductor device, comprising:

providing backlight illumination of said connector pins via a first optical path which is reflected by a beamsplitter;

directing light passing said connector pins onto a second optical path toward said beamsplitter; and

detecting light passing through said beamsplitter to form an image of said connector pins.

12. A method as specified in claim 11 further including illuminating ends of said connector pins via said first optical path and detecting light reflected by said pins and passing through said beamsplitter.

13. A method for inspecting connector pins of a semiconductor device, comprising:

providing backlight illumination of said connector pins via a first optical path which passes through a beamsplitter;

directing light passing said connector pins onto a second optical path toward said beamsplitter; and

detecting light reflected by said beamsplitter to form an image of said connector pins.

14. A method as specified in claim 13 further including illuminating ends of said connector pins via said first optical path and detecting light reflected by said pins and reflected by said beamsplitter.