Method and apparatus for depth profile analysis by laser induced plasma spectros copy

• US 6,532,068 B2
• Filed: 07/17/2001
• Issued: 03/11/2003
• Est. Priority Date: 07/17/2001
• Status: Expired due to Fees

• Current Assignee: National Research Council Canada
• Original Assignee: National Research Council Canada
• Inventors: Detalle, Vincent, Sabsabi, Mohamad
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): Allen, Denise S.
• Application Number:
  US09/906,061
• Publication Number:
  US 20030016353A1
• Time in Patent Office: 602 Days
• Field of Search: 356/318, 356/317, 356/36, 438/16, 438/14, 219/121.76, 219/121.77, 250/372
• US Class Current: 356/318
• CPC Class Codes: B23K 26/032 using optical means
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/364 for making a groove or trench, e.g. for scribing a break initiation groove
• CPC Class Codes: G01N 21/718 Laser microanalysis, i.e. with formation of sample plasma

Abstract

In a method of spectrochemical depth-profile analysis of heterogeneous materials, a first burst of ablation laser pulses in a first beam is directed at a sample to form an ablation crater. A second single pulse or burst of laser pulses in a second beam having a smaller width than said first beam is then directed at the bottom of the crater so as to create a plasma that emits radiation representative of a component in the sample without a significant contribution from the walls of the ablation crater. The intensity of radiation from the plasma is measured and the concentration of the selected component is determined from the intensity of the radiation. The depth at which the measurement is taken is then evaluated and the above steps repeated to determined the evolution of concentration of said selected component as a function of depth.

Claims

1. A method of spectrochemical depth-profile analysis of heterogeneous material, comprising:

a) directing a first burst of ablation laser pulses in a first beam at a sample to form an ablation crater with a bottom and wall;

b) directing a second single pulse or burst of laser pulses in a second beam having a smaller width than said first beam at the bottom of said crater so as to create a plasma that emits radiation representative of a component in the sample without significant contribution from the wall of the ablation crater,

c) measuring the intensity of radiation from said plasma;

d) determining the concentration of said selected component in said material from the intensity of said radiation; and

e) evaluating the depth at which said plasma is created.

2. A method as claimed in claim 1, wherein the steps a to e are repeated in order to determine the evolution of concentration of said selected component as a function of depth.

3. A method as claimed in claim 1, wherein said first and second beams are produced by passing a laser beam through diaphragms of different widths.

4. A method as claimed in claim 2, wherein a movable diaphragm support containing large and small diaphragms is located in a common laser beam, and said movable diaphragm support is displaced to bring respectively the large and small diaphragm into said common laser beam to create sequentially said first and second beams.

5. A method as claimed in claim 2, wherein said laser beam is passed through a beam splitter to generate said first and second beams, and a shutter is located in each said first and second beams to block one of said first and second beams while the other of said first and second beams is active.

6. A method as claimed in claim 3, wherein said first and second beams are produced by a respective first and second lasers, and said diaphragms are located in said first and second beams produced by said first and second lasers.

7. A method as claimed in claim 1, wherein said second pulse or burst of pulses are of mixed wavelength.

8. A method as claimed in claim 1, wherein said second pulse or burst of pulses are generated by a wavelength tunable laser.

9. A method as claimed in claim 3, wherein said first beam is homogenized with a homogenizer upstream of said diaphragm in said first beam.

10. A method as claimed in claim 9, wherein the depth is measured by a technique selected from the group consisting of:

confocal microscopy, laser triangulation and interferometry using a short coherence length light source.

11. A method as claimed in claim 9, wherein the measurement of depth is enhanced by interpolation.

12. A method as claimed in claim 1, wherein the ablation rate is initially calibrated by measuring the depth after a known number of laser shots, and the calibrated ablation rate is then used to determine the depth in step e for subsequent measurements.

13. A method as claimed in claim 1, wherein the width of the second beam is about ⅓

the width of the first beam.

14. A method as claimed in claim 1, wherein said second beam is focused at the center of the bottom of said crater.

15. A method as claimed in claim 1, wherein the ratio of pulses of said first laser burst to said second laser pulse or burst is about 100:

1.

16. An apparatus for laser-based spectrochemical depth-profile analysis of a heterogeneous material, comprising:

an energy source for generating pulses of energy in the form of a first beam of predetermined width incident on a sample to cause ablation thereof and thereby form a crater with a bottom and a wall;

an energy source for generating a single pulse or burst of pulses in a second beam of laser light, said second beam having a width less than said first beam and being directed at the bottom of said crater so as to form a plasma emitting radiation representative of a selected component present in said material without significant contribution from the wall of the crater;

a detector for measuring the intensity of radiation of said selected component at different depths of crater; and

a depth profile evaluator for determining the depth of the crater for each radiation intensity measurement.

17. An apparatus as claimed in claim 16, wherein the energy source for producing said first beam and said energy source for producing said second beam are provided by a common laser generating an output beam, which is formed into said first and second beams.

18. An apparatus as claimed in claim 17, further comprising a beam splitter for forming said output beam into said first and second beams.

19. An apparatus as claimed in claim 18, comprising a first diaphragm in said first beam and a second diaphragm in said second beam, said second diaphragm having a smaller diameter than said first diaphragm.

20. An apparatus as claimed in claim 19, further comprising a shutter in each of said first and second beams to block one of said first and second beams while the other of said first and second beams is active.

21. An apparatus as claimed in claim 17, comprising first and second diaphragms, said second diaphragm having a smaller diameter than said first diaphragm, each of said diaphragms being locatable in said output beam to provide sequentially said first and second beams.

22. An apparatus as claimed in claim 20, wherein said first and second diaphragms are mounted on a displaceable support.

23. An apparatus as claimed in claim 16, wherein said energy source for producing said first beam and said energy source for producing said second beam are respectively provided by first and second lasers.

24. An apparatus as claimed in claim 23, comprising a first diaphragm in said first beam and a second diaphragm in said second beam, said second diaphragm having a smaller diameter than said first diaphragm.

25. An apparatus as claimed in claim 16, further comprising a counter for counting the number of laser pulses to provide a controlled sequence of laser pulses on the sample.

26. An apparatus as claimed in claim 16, further comprising a lens for focusing second beam in the center of the bottom of said crater.

27. An apparatus as claimed in claim 16, further comprising an arrangement for ensuring that said first and second beams are substantially concentric.

28. An apparatus as claimed in claim 16, wherein said detector is an optical spectrometer.

29. An apparatus as claimed in claim 28, wherein said optical spectrometer comprises an enhanced gated photodiode array.

30. An apparatus as claimed in claim 28, wherein said optical spectrometer comprises an enhanced charge coupled devices.

31. An apparatus as claimed in claim 28, wherein said optical spectrometer comprises an array of individually positioned photomultipliers.

32. An apparatus as claimed in claim 16, wherein said depth profile evaluator, comprises an optical profilometer selected from the group consisting of:

a confocal microscopy measurement device, a laser triangulation device, and an interferometer using a short coherence length light source.