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Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework

  • US 6,532,555 B1
  • Filed: 10/29/1999
  • Issued: 03/11/2003
  • Est. Priority Date: 10/29/1999
  • Status: Expired due to Term
First Claim
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1. A method for providing fault detection in a manufacturing process, comprising:

  • receiving at a first interface operational data of a processing tool related to the manufacture of a processing piece, and product data defining characteristics of the processing piece;

    sending the operational and product data from the first interface to a second interface;

    translating the operational and product data at the second interface from a first communications protocol used by the first interface to a second communications protocol used by a controller;

    sending the operational and product data from the second interface to the controller;

    accumulating the operational and product data at the controller;

    sending the accumulated operational and product data from the controller to a fault detection unit upon occurrence of a predetermined event; and

    determining if a fault condition exists with the processing tool based upon the operational data and if a fault condition exists with the processing piece based upon the product data at the fault detection unit.

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