Free-space optical wavelength routing element based on stepwise controlled tilting mirrors

• US 6,535,319 B2
• Filed: 07/03/2001
• Issued: 03/18/2003
• Est. Priority Date: 07/03/2001
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: Network Photonics, Inc.
• Inventors: Marinelli, David, Staple, Bevan, Buzzetta, Victor
• Primary Examiner(s): Kim, Robert H.
• Assistant Examiner(s): Caley, Michael H.
• Application Number:
  US09/899,000
• Publication Number:
  US 20030007721A1
• Time in Patent Office: 623 Days
• Field of Search: 385/15, 385/16, 385/17, 385/18, 385/24, 359/221, 359/225, 359/849, 359/872-876
• US Class Current: 359/225.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/2931 Diffractive element operating in reflection
• CPC Class Codes: G02B 6/29313 characterised by means for controlling the position or direction of light incident to or leaving the diffractive element, e.g. for varying the wavelength response switching G02B6/35
• CPC Class Codes: G02B 6/29328 Diffractive elements operating in reflection
• CPC Class Codes: G02B 6/29395 configurable, e.g. tunable or reconfigurable switching G02B6/35
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3558 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3598 Switching means directly located between an optoelectronic element and waveguides, including direct displacement of either the element or the waveguide, e.g. optical pulse generation based on changing the optical properties of the medium G02F1/00; optical pulse generation in optical transmitters H04B10/508; optical pulse generation by controlling laser operation H01S3/00
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A microstructure for steering light is provided. A pivot member is connected with a structural film and supports a base that includes a reflective coating. A fixed rotational actuator is connected with the structural film and is configured to rotate the base on the pivot member upon actuation. A movable hard stop is connected with the structural film. The movable hard stop is configured such that in each of a plurality of its positions, the base assumes one of a plurality of tilt positions upon actuation of the fixed rotational actuator.

Claims

1. A microstructure for steering light, the microstructure comprising:

a structural film;

a pivot member connected with the structural film and supporting a base, the base including a reflective coating;

a first fixed rotational actuator connected with the structural film and configured to rotate the base on the pivot member upon actuation; and

a first movable hard stop connected with the structural film, wherein in each of a plurality of positions of such first movable hard stop the base assumes one of a first plurality of tilt positions upon actuation of the first fixed rotational actuator.

2. The microstructure recited in claim 1 wherein the first movable hard stop is linearly actuated.

3. The microstructure recited in claim 1 further comprising:

a second fixed rotational actuator connected with the structural film and configured to rotate the base on the pivot member upon actuation; and

a second movable hard stop connected with the structural film, wherein in each of a plurality of positions of such second movable hard stop the base assumes one of a second plurality of tilt positions upon actuation of the second fixed rotational actuator.

4. The microstructure recited in claim 3 wherein each of the plurality of positions of such first movable hard stop is correlated with one of the plurality of positions of such second movable hard stop.

5. The microstructure recited in claim 4 wherein the first and second movable hard stops are connected with a connection member.

6. The microstructure recited in claim 3,

wherein such first movable hard stop comprises a first plurality of discrete levels, each of which corresponds with one of the plurality of positions of such first movable hard stop to define one of the first plurality of tilt positions;

and

wherein such second movable hard stop comprises a second plurality of discrete levels, each of which corresponds with one of the plurality of positions of such second movable hard stop to define one of the second plurality of tilt positions.

7. The microstructure recited in claim 6 wherein the first and second movable hard stops comprise the same number of discrete levels.

8. The microstructure recited in claim 1 wherein such first movable hard stop comprises a plurality of discrete levels, each of which corresponds with one of the plurality of positions of such first movable hard stop to define one of the first plurality of tilt positions.

9. The microstructure recited in claim 1 wherein the pivot member comprises a torsion beam.

10. The microstructure recited in claim 1 wherein the pivot member comprises a cantilever.

11. The microstructure recited in claim 1 wherein the reflective coating comprises gold.

12. A method for fabricating a microstructure for steering light, the method comprising:

forming a pivot member on a structural film;

forming a base on the pivot member;

depositing a reflective coating on the base;

forming a first fixed rotational actuator over the structural film, the first fixed rotational actuator being configured to rotate the base on the pivot member upon actuation; and

forming a first movable hard stop over the structural film, such first movable hard stop being configured such that in each of a plurality of positions of such first movable hard stop the base assumes one of a first plurality of tilt positions upon actuation of the first fixed rotational actuator.

13. The method recited in claim 12 wherein the first movable hard stop is linearly actuated.

14. The method recited in claim 12 further comprising:

forming a second fixed rotational actuator over the structural film, the second fixed rotational actuator being configured to rotate the base on the pivot member upon actuation; and

forming a second movable hard stop over the structural film, such second movable hard stop being configured such that in each of a plurality of positions of such second movable hard stop the base assumes one of a second plurality of tilt positions upon actuation of the second rotational actuator.

15. The method recited in claim 14 further comprising correlating each of the plurality of positions of such first movable hard stop with one of the plurality of positions of such second movable hard stop.

16. The method recited in claim 15 wherein correlating each of the plurality of positions of such first movable hard stop with one of the plurality of positions of such second movable hard stop comprises connecting such first movable hard stop with such second movable hard stop.

17. The method recited in claim 14,

wherein forming such first movable hard stop comprises forming a first plurality of discrete levels on such first movable hard stop, each of which corresponds with one of the plurality of positions of such movable hard stop to define one of the first plurality of tilt positions;

and

wherein forming such second movable hard stop comprises forming a second plurality of discrete levels on such second movable hard stop, each of which corresponds with one of the plurality of positions of such movable hard stop to define one of the second plurality of tilt positions.

18. The method recited in claim 17 wherein the same number of discrete levels are formed on the first and second movable hard stops.

19. The method recited in claim 12 wherein forming such first movable hard stop comprises forming a first plurality of discrete levels on such first movable hard stop, each of which corresponds with one of the plurality of positions of such movable hard stop to define one of the first plurality of tilt positions.

20. The method recited in claim 12 wherein forming the pivot member comprises forming a torsion beam.

21. The method recited in claim 12 wherein forming the pivot member comprises forming a cantilever.

22. The method recited in claim 12 wherein the reflective coating comprises gold.

23. A method for steering light from an input port to one of a plurality of output ports, the method comprising:

moving a movable hard stop over a structural film to one of a plurality of positions for such movable hard stop;

tilting an end of a micromirror assembly towards the structural film by applying an electrostatic force, wherein the micromirror assembly assumes one of a plurality of tilt positions defined by the plurality of positions for such movable hard stop; and

reflecting light provided by such input port off the micromirror assembly to such one output port.

24. The method recited in claim 23 wherein moving the movable hard stop comprises translating the movable hard stop.

25. The method recited in claim 23 wherein the movable hard stop is one of a plurality of such movable hard stops configured to define the plurality of tilt positions.

26. The method recited in claim 23 wherein the movable hard stop comprises a plurality of discrete levels, each of which corresponds with one of the plurality of positions of such movable hard stop to define one of the plurality of tilt positions.

27. A method for defining alignment of a plurality of micromirror assemblies between input and output ports, each such micromirror assembly including a base pivotally connected with a structural film, the base having a reflective coating, the method comprising, for each such micromirror assembly:

moving a movable hard stop over the structural film to a plurality of positions;

for each such position,

tilting an end of such micromirror assembly towards the structural film by applying an electrostatic force, wherein such micromirror assembly assumes one of a plurality of tilt positions defined by the plurality of positions for such movable hard stop; and

measuring an alignment acceptability for such position by reflecting light from one such input port off the micromirror assembly; and

determining which of such positions provides the greatest alignment acceptability.

28. The method recited in claim 27 wherein moving the movable hard stop comprises translating the movable hard stop.

29. The method recited in claim 27 wherein the movable hard stop is one of a plurality of such movable hard stops configured to define the plurality of tilt positions for each such micromirror assembly.

30. The method recited in claim 27 wherein the movable hard stop comprises a plurality of discrete levels, each of which corresponds with one of the plurality of positions of such movable hard stop to define one of the plurality of tilt positions for each such micromirror assembly.

31. A microstructure for steering light, the microstructure comprising:

support means;

tiltable micromirror means connected with the support means;

first electrostatic-field-generation means for providing a first electrostatic field to tilt the tiltable micromirror means upon actuation; and

first movable stop means connected with the support means for defining a first plurality of tilt positions of the tiltable micromirror means in accordance with a plurality of positions for the first movable stop means.

32. The microstructure recited in claim 31 wherein the movable stop means is linearly actuated.

33. The microstructure recited in claim 31 further comprising:

second electrostatic-field-generation means for providing a second electrostatic field to tilt the tiltable micromirror means upon actuation; and

second movable stop means connected with the support means for defining a second plurality of tilt positions of the tiltable micromirror means in accordance with a plurality of positions for the second movable stop means.

34. The microstructure recited in claim 33 further comprising connection means to connect the first movable stop means with the second movable stop means.

35. The microstructure recited in claim 31 wherein the first movable stop means comprises a plurality of discrete levels, each of which corresponds with one of the plurality of positions for the first movable stop means to define one of the first plurality of tilt positions.

36. A wavelength router for receiving, at an input port, light having a plurality of spectral bands and directing subsets of the spectral bands to respective ones of a plurality of output ports, the wavelength router comprising:

a free-space optical train disposed between the input port and the output ports providing optical paths for routing the spectral bands, the optical train including a dispersive element disposed to intercept light traveling from the input port; and

a routing mechanism having at least one dynamically configurable routing element to direct a given spectral band to different output ports depending on a state of the dynamically configurable routing element, wherein the dynamically configurable routing element includes;

a micromirror assembly connected with a structural film by a pivot member;

a first fixed rotational actuator connected with the structural film and configured to rotate the micromirror assembly on the pivot member upon actuation; and

a first movable hard stop connected with the structural film, wherein in each of a plurality of positions of such first movable hard stop the micromirror assembly assumes one of a first plurality of tilt positions upon actuation of the first fixed rotational actuator in accordance with the state of the dynamically configurable routing element.

37. The wavelength router recited in claim 36 wherein the first movable hard stop is linearly actuated.

38. The wavelength router recited in claim 36 wherein the dynamically configurable routing element further includes:

a second fixed rotational actuator connected with the structural film and configured to rotate the micromirror assembly on the pivot member upon actuation; and

a second movable hard stop connected with the structural film, wherein in each of a plurality of positions of such second movable hard stop the micromirror assembly assumes one of a second plurality of tilt positions upon actuation of the second fixed rotational actuator in accordance with the state of the dynamically configurable routing element.

39. The wavelength router recited in claim 38 wherein the first and second movable hard stops are connected.

40. The wavelength router recited in claim 36 wherein such first movable hard stop comprises a first plurality of discrete levels, each of which corresponds with one of the plurality of positions of such first movable hard stop to define one of the first plurality of tilt positions.