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Method for localizing and isolating an errant process step

  • US 6,535,776 B1
  • Filed: 09/20/1999
  • Issued: 03/18/2003
  • Est. Priority Date: 09/20/1999
  • Status: Expired due to Term
First Claim
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1. A method for localizing and isolating an errant process step in multi-step processes, comprising the steps of:

  • retrieving from a defect image database a selection of images, each said image having image content similar to image content extracted from a query image depicting a defect, each said image in said selection having corresponding defect characterization data; and

    directly deriving from said defect characterization data a conditional probability distribution of said defect having occurred in at least one process step;

    wherein a particular process step from said process steps can be identified as a highest probable source of said defect based on said conditional probability distribution.

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