×

Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework

  • US 6,535,783 B1
  • Filed: 03/05/2001
  • Issued: 03/18/2003
  • Est. Priority Date: 03/05/2001
  • Status: Expired due to Term
First Claim
Patent Images

1. A method, comprising:

  • obtaining operational state data of a processing tool related to the manufacture of a processing piece;

    collecting the state data at a data server;

    processing the state data at the data server by a processor within the data server;

    sending the processed state data from the data server to a first interface;

    sending the processed state data from the first interface to a fault detection unit;

    determining if a fault condition exists with the processing tool based upon the state data; and

    performing a predetermined action on the processing tool in response to the presence of a fault condition.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×