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Flow velocity detector

  • US 6,536,274 B1
  • Filed: 04/16/2001
  • Issued: 03/25/2003
  • Est. Priority Date: 06/14/1999
  • Status: Active Grant
First Claim
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1. A flow velocity detector comprising:

  • a substrate;

    a diaphragm portion provided on said substrate;

    a heater provided on said diaphragm portion;

    temperature sensors formed on both sides of said heater, wherein said temperature sensors are formed in comb tooth-shape having recessed and projected sections, and said recessed and projected sections of the temperature sensors are positioned approximately in parallel with the flow direction of the detected fluid; and

    wherein said comb tooth-shape temperature sensors are positioned a defined distance from said heater such that said temperature sensors and said heater are not superposed on each other.

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