Thin film MEMS sensors employing electrical sensing and force feedback

• US 6,536,280 B1
• Filed: 09/12/2000
• Issued: 03/25/2003
• Est. Priority Date: 09/12/2000
• Status: Expired due to Fees

• Current Assignee: Cymatics Laboratories Corp.
• Original Assignee: IC Mechanics
• Inventors: Carley, L. Richard
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): SAINT SURIN, JACQUES M
• Application Number:
  US09/659,961
• Time in Patent Office: 924 Days
• Field of Search: 734/88, 735/040.3, 735/140.1, 735/142.4, 735/143.2, 735/143.8, 735/141.4, 735/141.8, 361/280, 361/283.1, 361/283.3
• US Class Current: 73/504.02
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

This invention discloses a method for electronically decreasing the sensitivity of thin film movable micromachined layers to vibrations, accelerations, or rotations that would result in part or all of the movable layer being displaced in the direction of the film thickness. In addition, the disclosed method can also be used to remove some of the curvature introduced into thin film movable structures due to vertical stress gradients. Electronic stiffening is achieved by using position sensing and force feedback at one or more points on the movable micromachined structure. Precise servo control of Z axis height makes it possible to dramatically decrease the spacing between the movable MEMS layer or layers and fixed electrodes, which can lead to a dramatic increase in sensitivity and/or actuation force.

Claims

1. In a microelectromechanical structure having one or more moveable masses, said one or more masses being capable of movement in one or more dimensions, a method for controlling undesired movements of said one or more moveable masses comprising the steps of:

providing one or more electrodes near said mass, thereby forming one or more variable capacitances between said electrodes and said one or more moveable masses;

measuring the variations in the capacitance of said one or more variable capacitances due to movement of said one or more masses;

imposing a voltage on one or more of said electrodes, thereby creating an electrostatic force between said one or more electrodes and said one or more moveable masses; and

varying the magnitude of said voltage on said electrodes as a function of said measured variations in said capacitance of said one or more capacitive interfaces.

2. The method of claim 1 wherein said step of measuring capacitance variations is performed by imposing a high frequency signal on said one or more masses and sensing the current, voltage or charge thereby induced on said one or more electrodes.

3. The method of claim 1 wherein said step of measuring capacitance variations is performed by imposing a high frequency signal on one or more of said electrodes and sensing the current, voltage or charge thereby induced on said one or more masses.

4. In a microelectromechanical structure having one or more moveable masses, said one or more masses being capable of movement in one or more dimensions, a method for controlling undesired movements of said one or more moveable masses comprising the steps of:

providing a first plurality of finger-shaped electrodes connected to said one or more moveable masses;

providing a second plurality of stationary finger-shaped electrodes; and

providing a third plurality of stationary finger-shaped electrodes interdigitated with said second plurality of electrodes;

wherein said second and third pluralities of electrodes are disposed in a plane below said first plurality of electrodes such that movement of said first plurality of electrodes with respect to said second and third pluralities of electrodes causes variations in the capacitance between said first plurality of electrodes and said second and third pluralities of electrodes;

measuring said variations in the capacitance of said one or more variable capacitances due to movement of said one or more masses;

imposing a voltage on one or more of said electrodes, thereby creating an electrostatic force between said one or more electrodes and said one or more moveable masses; and

varying the magnitude of said voltage on said electrodes as a function of said measured variations in said capacitance of said one or more capacitive interfaces.

5. The method of claim 4 wherein said step of imposing a voltage includes imposing a variable voltage on said second and third plurality of electrodes, thereby imparting a downward electrostatic force on said one or more movable masses.

6. The method of claim 5 wherein said step of providing one or more electrodes further includes providing one or more stationary electrodes above said one or more movable masses.

7. The method of claim 6 wherein said step of imposing a voltage further includes imposing a variable voltage on said one or more electrodes above said one or more movable masses, thereby imparting an upward electrostatic force on said one or more movable masses.

8. The method of claim 7 further comprising the step of detecting movement of said one or more moveable masses along the Z axis and applying a variable voltage to each of said second and third pluralities of electrodes and said one or more electrodes above said one or more moveable masses to dampen said movement of said one or more moveable masses about the Z axis.

9. The method of claim 8 wherein said step of detecting movements along the Z axis includes the step of detecting variations in the capacitance between individual ones of first plurality of electrodes and individual pairs of said second and third pluralities of electrodes corresponding to said individual ones of said first plurality of electrodes.

10. The method of claim 5 wherein said step of providing one or more electrodes further includes providing one or more electrodes below said one or more movable masses.

11. The method of claim 10 wherein said step of imposing a voltage further includes imposing a variable voltage on said one or more electrodes below said movable mass, thereby imparting a downward electrostatic force on said one or more movable masses.

12. The method of claim 11 further comprising the step of detecting rotations of said one or more moveable masses about the X and/or Y axes and applying a variable voltage to each of said one or more electrodes below said one or more moveable masses to dampen said rotations of said one or more moveable masses about the X and/or Y axes.

13. The method of claim 12 wherein said step of detecting rotations includes the step of detecting variations in the capacitance between individual ones of first plurality of electrodes and individual pairs of said second and third pluralities of electrodes corresponding to said individual ones of said first plurality of electrodes.

14. A microelectromechanical structure comprising:

one or more moveable masses, said one or more moveable masses capable of movement in one or more dimensions;

one or more electrodes disposed near said one or more masses, such as to form one or more variable capacitances between all or a subset of said electrodes and said masses; and

circuitry, coupled to said one or more moveable masses and said one or more electrodes, for measuring said variance in said capacitances when said one or more moveable masses moves and for arresting said movement of said one or more moveable masses by creating a voltage potential between all or a subset of said electrodes and said one or more moveable masses.

15. A microelectromechanical structure comprising:

one or more moveable masses, said one or more moveable masses capable of movement in one or more dimensions;

a first plurality of finger-shaped electrodes connected to said one or more moveable masses;

a second plurality of stationary finger-shaped electrodes;

a third plurality of stationary finger-shaped electrodes interdigitated with said second plurality of electrodes;

a means for imposing a variable voltage on said second and third pluralities of electrodes; and

circuitry, coupled to said one or more moveable masses and said one or more electrodes, for measuring the variance in capacitances when said one or more moveable masses moves and for arresting said movement of said one or more moveable masses by creating a voltage potential between all or a subset of said electrodes and said one or more moveable masses, wherein said second and third pluralities of electrodes are disposed in a plane below said first plurality of electrodes such that movement of said first plurality of electrodes with respect to said second and third pluralities of electrodes causes variations in the capacitance between said first plurality of electrodes and said second and third pluralities of electrodes which can be measured by said circuitry.

16. The microelectromechanical structure of claim 15 wherein said one or more moveable masses are disposed in a single plane.

17. The device of claim 16 further comprising one or more stationary electrodes disposed above said one or more moveable masses.

18. The device of claim 17 further comprising a means for imposing a one or more variable voltages on said one or more stationary electrodes disposed above said one or more moveable masses for damping said movement of said masses by creating a voltage potential between said masses.

19. The device of claim 16 further comprising one or more electrodes disposed below said one or more moveable masses.

20. The device of claim 19 further comprising a means for imposing one or more variable voltages on said one or more electrodes disposed below said one or more moveable masses for damping said movement of said masses by creating a voltage potential between said masses.

21. The device of claim 16 further comprising one or more stationary electrodes disposed above said one or more moveable masses and one or more stationary electrodes disposed below said one or more moveable masses.

22. The device of claim 21 further comprising:

a means for imposing one or more variable voltages on said one or more stationary electrodes disposed above said one or more moveable masses; and

a means for imposing one or more variable voltages on said one or more stationary electrodes disposed below said one or more moveable masses;

wherein a voltage potential is created between said electrodes and said one or more moveable masses and for damping said movement of said one or more moveable masses.

23. The microelectromechanical structure of claim 15 wherein said one or more moveable masses are disposed in a plurality of planes, thereby forming variable capacitances between moveable masses located in different planes.

24. The microelectromechanical structure of claim 23 further comprising circuitry coupled to said one or more moveable masses, for measuring variable capacitances between said one or more moveable masses when said masses move and for arresting said movement of said masses by creating a voltage potential between said masses.

25. The device of claim 24 further comprising one or more stationary electrodes disposed above said one or more moveable masses.

26. The device of claim 25 further comprising a means for imposing a one or more variable voltages on said one or more stationary electrodes disposed above said one or more moveable masses for damping said movement of said one or more moveable masses.

27. The device of claim 24 further comprising one or more electrodes disposed below said one or more moveable masses.

28. The device of claim 27 further comprising a means for imposing one or more variable voltages on said one or more electrodes disposed below said one or more moveable masses for damping said movement of said one or more moveable masses.

29. The device of claim 24 further comprising one or more stationary electrodes disposed above said one or more moveable masses and one or more stationary electrodes disposed below said one or more moveable masses.

30. The device of claim 29 further comprising:

a means for imposing one or more variable voltages on said one or more stationary electrodes disposed above said one or more moveable masses; and

a means for imposing one or more variable voltages on said one or more stationary electrodes disposed below said one or more moveable masses;

wherein a voltage potential is created between said electrodes and said one or more moveable masses and for damping said movement of said one or more moveable masses.