Method and apparatus for transferring and supporting a substrate

• US 6,537,011 B1
• Filed: 07/31/2000
• Issued: 03/25/2003
• Est. Priority Date: 03/10/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wiltse, Mark, Ma, Frank C., Stoehr, Brigitte, Wang, Danny, Polar, Erwin, Lubomirsky, Dmitry, Mok, Yeuk-Fai Edwin
• Primary Examiner(s): Bratlie, Steven A.
• Application Number:
  US09/629,322
• Time in Patent Office: 967 Days
• Field of Search: 414/217, 414/941, 118/728, 118/729
• US Class Current: 414/217
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H01L 21/68721 characterised by edge clamping, e.g. clamping ring
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer

Abstract

A method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system. In one aspect, a support ring having one or more substrate support members mounted thereon and defining a central opening therein for receipt of a substrate support member during processing is disclosed. In another aspect, a substrate handler blade having a plurality of substrate supports disposed thereon is provided which is adapted to support a substrate thereon and effectuate substrate transfer between the substrate handler blade and the support ring.

Claims

1. An apparatus for supporting a substrate, comprising:

a base plate defining an opening at an interior portion thereof, wherein the base plate is adapted to be mounted on a pedestal and receive one or more lift pins from the pedestal; and

one or more substrate support members mounted on the base plate and forming a portion of an outer perimeter of the opening, wherein the one or more substrate support members comprise an upper portion, a lower portion, and a tapered portion disposed between the upper portion and lower potion for receiving a substrate vertically displaced above the base plate.

2. The apparatus of claim 1, wherein an edge of the substrate is received on the tapered portion of the one or more substrate support members.

3. The apparatus of claim 2, wherein the tapered portion has an inclined surface of about 2°

to about 7°

.

4. The apparatus of claim 2, wherein the tapered portion has an inclined surface of about 2.5°

.

5. The apparatus of claim 2, wherein the one or more substrate support members are horizontally displaced from one another and adapted to be mated with one or more pedestal substrate supports mounted on the pedestal.

6. The apparatus of claim 2, wherein the support ring comprises an etch resistant material.

7. The apparatus of claim 6, wherein the etch resistant material is aluminum oxide.

8. A substrate processing system, comprising:

a transfer chamber;

at least one processing chamber having;

a pedestal including a support surface and one or more pedestal support members;

a support ring having a base plate defining an opening at an interior portion thereof, wherein the base plate is adapted to be mounted on a support surface and one or more substrate support members mounted on the base plate and forming a portion of an outer perimeter of the opening, wherein the one or more substrate support members comprise an upper portion, a lower portion, and a tapered portion disposed between the upper portion and lower potion and one or more support member openings extending therethrough configured to accept the one or more pedestal substrate support members;

one or more loadlock chambers; and

a substrate handler disposed in the transfer chamber.

9. The substrate processing system of claim 8, wherein the the tapered portion has an inclined surface of about 2°

to about 7°

.

10. The substrate processing system of claim 8, wherein the substrate handler further comprises a substrate handler blade having a base plate and one or more retaining members extending from the base plate.

11. The substrate processing system of claim 10, wherein the one or more retaining members comprise a base portion, an end portion, and a vertical sort portion forming an inclined surface from the base portion to the end portion.

12. The substrate processing system of claim 11, wherein the inclined surface has an angle of between about 2°

and about 7°

.

13. The substrate processing system of claim 10, wherein the substrate handler blade comprises a base plate having a first end, a center portion, and a second end;

the one or more retaining members including;

one or more retaining wings extending parallel along the center portion from the first end of the base plate, wherein the one or more retaining wings justify the substrate to the center portion of the base plate; and

one or more retaining fingers extending from the second end of the base plate, wherein the one or more retaining fingers justify the substrate to the center portion of the base plate.

14. The substrate processing system of claim 13, wherein the substrate handler blade further comprises one or more inclined support surfaces disposed on the base plate, wherein the one or more inclined support surfaces justify the substrate to the center portion of the base plate.

15. The substrate processing system of claim 14, wherein the inclined surfaces have an angle of between about 2°

and about 7°

.

16. A processing chamber, comprising:

an enclosure defining a process region;

a pedestal having a substrate support surface and one or more pedestal substrate support members disposed in the enclosure; and

a base plate defining an opening at an interior portion thereof configured to receive the substrate support surface and one or more substrate support members mounted on the base plate and forming a portion of an outer perimeter of the opening, wherein the one or more substrate support members are adapted to accept a substrate and have one or more support member openings extending therethrough configured to accept the one or more pedestal substrate support members.

17. The processing chamber of claim 16, wherein the one or more second substrate support members comprise an upper portion, a lower portion, and a tapered portion disposed between the upper portion and lower potion for receiving a substrate.

18. The processing chamber of claim 17, wherein the tapered portion has an inclined surface of from about 2°

to about 7°

.

19. The processing chamber of claim 16, wherein the pedestal further comprises one or more lift pins for vertically displacing a support ring.

20. The processing chamber of claim 16, further comprising one or more inclined support surfaces disposed on the base plate, wherein the one or more inclined support surfaces justify the substrate to the center portion of the base plate.

21. A substrate handler blade, comprising:

a base plate having a first end and a second end;

a shoulder coupled to the first end of the base plate;

one or more inclined support surfaces disposed on the base plate and coupled to the shoulder;

one or more retaining wings extending from the first end of the base plate, wherein the one or more retaining wings comprise a base portion, an end portion, and an inclined surface from the base portion to the end portion; and

one or more retaining fingers disposed on the second end of the base plate, wherein the one or more retaining fingers comprise a base portion, an end portion, and an inclined surface from the base portion to the end portion.

22. The substrate handler blade of claim 21, wherein the one or more inclined surfaces have an angle of between about 2°

and about 7°

.