Piezoelectric/electrostrictive device and method of manufacturing same
First Claim
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1. A piezoelectric/electrostrictive device comprising:
- a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting said thin plate sections and said movable section;
one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections; and
a hole formed by both inner walls of said pair of thin plate sections, an inner wall of said movable section, and an inner wall of said fixation section, wherein;
said movable section has a cutout.
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Abstract
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.
26 Citations
18 Claims
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1. A piezoelectric/electrostrictive device comprising:
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a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting said thin plate sections and said movable section;
one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections; and
a hole formed by both inner walls of said pair of thin plate sections, an inner wall of said movable section, and an inner wall of said fixation section, wherein;
said movable section has a cutout. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A piezoelectric/electrostrictive device comprising:
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a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting said thin plate sections and said movable section;
one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections; and
a hole formed by both inner walls of said pair of thin plate sections, an inner wall of said movable section, and an inner wall of said fixation section, wherein;
a part of said inner wall of said movable section is expanded in said hole. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification