Method for measuring stress induced leakage current and gate dielectric integrity using corona discharge

• US 6,538,462 B1
• Filed: 11/30/1999
• Issued: 03/25/2003
• Est. Priority Date: 11/30/1999
• Status: Expired due to Fees

• Current Assignee: Semiconductor Diagnostics, Inc. (SEMILAB Félvezeto Fizikai Laboratórium Zrt.)
• Original Assignee: Semiconductor Diagnostics, Inc. (SEMILAB Félvezeto Fizikai Laboratórium Zrt.)
• Inventors: Wilson, Marshall, Lagowski, Jacek, Savtchouk, Alexander
• Primary Examiner(s): Cuneo, Kamand
• Assistant Examiner(s): HOLLINGTON, JERMELE M
• Application Number:
  US09/451,652
• Time in Patent Office: 1,211 Days
• Field of Search: 324/760, 324/765, 324/158.1, 324/750, 324/455, 438/14, 438/17, 438/18
• US Class Current: 324/762.05
• CPC Class Codes: G01R 31/2648 Characterising semiconductor materials testing of materials or semi-finished products G01R31/2831; testing during manufacture H01L22/00
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

SILC characteristics and density of GOI defects of silicon wafers with thin dielectric films (e.g. SiO₂) are determined using a non-contact method that does not require any test structures on the wafer. The method includes stressing a dielectric with a corona discharge and measuring the dielectric current-dielectric voltage (I-V) characteristics by monitoring under illumination the corona charge neutralization after stress. An I-V measurement done as function of corona fluence gives SILC characteristics of the wafer. The SILC characteristics are then compared at a constant dielectric field to provide a measure of GOI defect density. The I-V characteristic corresponding to low fluence that does not generate measurable SILC are used to determine a thickness of dielectric film.

Claims

1. A method of characterizing a dielectric layer disposed on a semiconductor wafer, the method comprising:

positioning the semiconductor wafer relative to a test device;

depositing on a surface of the dielectric layer a corona ionic charge at a rate and fluence sufficient to change a tunneling current between the semiconductor wafer and the dielectric layer; and

measuring with the test device, a stress induced leakage current characteristic across the dielectric layer.

2. The method of claim 1, wherein the stress induced leakage current characteristic comprises a current density across the dielectric layer versus a dielectric field for a specific fluence of stress or the dielectric layer.

3. The method of claim 1, further comprising illuminating the dielectric layer of the semiconductor wafer while measuring the stress induced leakage current to reduce the surface barrier contribution to the stress induced leakage current.

4. The method of claim 1, wherein the corona ionic charge deposited on the dielectric surface increases a tunneling current at a given oxide electric field.

5. The method of claim 1, wherein the semiconductor wafer comprises silicon.

6. The method of claim 5, wherein the dielectric layer is SiO₂.

7. The method of claim 1, wherein measuring the stress induced leakage current includes using the measurement test device to apply a charge to the dielectric layer of the semiconductor wafer at a level sufficient to stress the dielectric layer by causing a current flow across the dielectric layer, and measuring a current-voltage characteristic after stressing the dielectric layer.

8. The method of claim 7, wherein applying the charge includes applying charge to the dielectric layer of the semiconductor wafer with a corona stress element.

9. The method of claim 7, wherein measuring the current-voltage characteristic includes measuring a potential difference between a probe and the dielectric layer on the semiconductor wafer and calculating a current density across the dielectric layer.

10. The method of claim 7, wherein measuring the stress induced leakage current includes precharging the dielectric layer with charge of the same polarity as the charge for stressing the dielectric layer.

11. The method of claim 7, further comprising illuminating the dielectric surface of the semiconductor wafer while applying the charge to the dielectric layer to reduce the surface barrier contribution to the stress induced leakage current.

12. The method of claim 11, further comprising illuminating the dielectric surface of the semiconductor wafer while measuring the current-voltage characteristic of the semiconductor to reduce the surface barrier contribution to the stress induced leakage current.

13. A method of measuring gate oxide integrity of a dielectric layer disposed on a semiconductor wafer, the method comprising:

illuminating the dielectric layer with a light source to remove a voltage drop across the space charged region of the semiconductor wafer, and

applying a charge to the dielectric layer with a deposition rate sufficient to stress the semiconductor wafer to induce a tunneling current flow.

14. The method of claim 13, wherein illuminating and measuring a current-voltage characteristic of the semiconductor wafer are simultaneous.

15. The method of claim 13, wherein applying the charge includes applying a charge to the dielectric layer of the semiconductor wafer with a corona stress element.

16. The method of claim 13, wherein measuring the current-voltage characteristic includes measuring a current density across the dielectric layer and a potential difference between a probe and the semiconductor wafer.

17. The method of claim 13, wherein measuring the current-voltage characteristic includes precharging the dielectric layer of the semiconductor wafer.

18. The method of claim 13, further comprising correcting the measured current-voltage characteristic for a work function effect.

19. The method of claim 13, further comprising measuring a voltage versus time characteristic of the semiconductor wafer after applying the charge to the dielectric layer, and determining a current-voltage characteristic.

20. The method of claim 13, wherein illuminating and applying the charge to the dielectric layer are simultaneous.

21. The method of claim 20, further comprising simultaneously illuminating and measuring a current-voltage characteristic of the semiconductor wafer.

22. The method of claim 13, wherein the semiconductor wafer comprises silicon.

23. The method of claim 22, wherein the dielectric layer is SiO₂.

24. A method of measuring gate oxide integrity of a dielectric layer disposed on a semiconductor wafer, the method comprising:

moving the wafer into position below a charge source,

illuminating an area of the wafer under the source with a first light source,

setting charging conditions of the charge source,

turning on the charge source to stress the area of the wafer,

turning off the charge source and the first light source,

moving a probe above the wafer over the area stressed by the charge source,

illuminating the area of the wafer under the probe with a second light source,

measuring the contact potential as a function of time after turning off the charge source, and

calculating oxide current density as a function of oxide field.

25. The method of claim 24, further comprising determining a magnitude of a stress induced leakage current at a constant oxide field.

26. A method of measuring the gate oxide integrity of a dielectric layer disposed on a semiconductor wafer, the method comprising:

measuring a stress induced leakage current across the dielectric layer on the wafer,

determining a magnitude of the stress induced leakage current as a function of an oxide electric field strength, and

comparing the magnitude of stress induced leakage current to a standard magnitude of stress current at an oxide electric field strength, wherein the stress results from a corona ionic charge being deposited on a surface of the dielectric layer at a rate and a fluence sufficiently high to change a tunneling current between the semiconductor wafer and the dielectric layer.

27. The method of claim 26, further comprising determining the thickness of the oxide layer.

28. The method of claim 26, wherein the magnitude of the stress induced leakage current is determined at a constant stress fluence.

29. The method of claim 26, wherein the corona ionic charge deposited on the dielectric surface increases the tunneling current at a given oxide electric field.

30. A method of measuring a thickness of a dielectric layer disposed on a semiconductor wafer, the method comprising:

applying a charge to the dielectric layer at a level sufficient to stress the semiconductor wafer to produce a tunneling current between the semiconductor wafer and the dielectric layer, the tunneling current being related to the thickness of the dielectric layer,

measuring a current-voltage characteristic of the semiconductor wafer after applying the charge to the dielectric layer,

calculating an oxide current density as a function of oxide field, and

determining the dielectric thickness from the calculated oxide current density and oxide field.