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Micro-electro mechanical based optical attenuator

  • US 6,538,816 B2
  • Filed: 12/18/2000
  • Issued: 03/25/2003
  • Est. Priority Date: 12/18/2000
  • Status: Expired due to Term
First Claim
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1. A method for controlling a reflective attenuator in an optical system, having a lens system for directing a beam of light and a mirror for reflecting the directed beam of light, the mirror having a drive for selectively deflecting the mirror to achieve a desired attenuation comprising the steps of:

  • establishing a maximum deflection angle of the mirror corresponding to a maximum desired attenuation value in the optical system;

    supporting the mirror drive in an unpowered state to position the mirror at the maximum deflection angle;

    applying a voltage to the mirror drive to drive the mirror to a position to achieve optimum coupling; and

    decreasing the applied voltage to the drive system to permit the mirror to return to a deflection position between optimum coupling and the maximum deflection angle to obtain a selected attenuation.

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