Active electrostatic seal and electrostatic vacuum pump

• US 6,538,873 B1
• Filed: 11/02/1999
• Issued: 03/25/2003
• Est. Priority Date: 11/02/1999
• Status: Expired due to Fees

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Larsen, Grant Kenji
• Primary Examiner(s): Jackson, Stephen W.
• Assistant Examiner(s): KITOV, ZEEV V
• Application Number:
  US09/432,254
• Time in Patent Office: 1,239 Days
• Field of Search: 361/234, 361/233, 361/235, 361/230
• US Class Current: 361/234
• CPC Class Codes: F04B 45/067 Pumps having electric drive
• CPC Class Codes: F04B 45/08 having peristaltic action

Abstract

An electrostatic device includes a conductive element and a dielectric element having surfaces that are closely-spaced or contacting, a plurality of electrodes positioned adjacent to and electrically isolated from the surface of the dielectric element and a voltage source for applying voltages to the electrodes. Either the conductive element or the dielectric element is flexible. The voltages applied to the electrodes produce a moving wave in the flexible element, wherein a gas between the surfaces is transported in the direction of the moving wave. The device may function as an active electrostatic seal between the surfaces or as an electrostatic vacuum pump.

Claims

1. An electrostatic device comprising:

a conductive element and a dielectric element each having a surface, the surfaces of said dielectric element and said conductive element being closely-spaced or contacting, one of said conductive element and said dielectric element being flexible;

a plurality of electrodes positioned adjacent to and electrically isolated from the surface of said dielectric element; and

a voltage source for applying voltages to said electrodes for transporting a gas located between the surfaces of said conductive element and said dielectric element, wherein said voltage source generates voltages that each include attractive voltage segments and non-attractive voltage segments in a repeating sequence and wherein said voltages are phased such that said attractive voltage segments and said non-attractive voltage segments move from electrode to electrode and define a direction of gas transport.

2. An electrostatic device as defined in claim 1 wherein the surfaces of said dielectric element and said conductive element are substantially planar.

3. An electrostatic device as defined in claim 2 wherein said electrodes form closed loops.

4. An electrostatic device as defined in claim 3 wherein said electrodes comprise concentric rings.

5. An electrostatic device as defined in claim 2 wherein said electrodes comprise circular closed loops.

6. An electrostatic device as defined in claim 1 wherein the surfaces of said dielectric element and said conductive element are substantially cylindrical.

7. An electrostatic device as defined in claim 6 wherein one of said conductive element and said dielectric element comprises a shaft.

8. An electrostatic device as defined in claim 6 wherein said conductive element comprises a shaft and wherein said dielectric element is flexible.

9. An electrostatic device as defined in claim 8 wherein said electrodes comprise axially-spaced rings.

10. An electrostatic device as defined in claim 1 wherein the moving wave in said flexible element defines a moving pocket between the surfaces of said dielectric element and said conductive element and wherein the gas located between the surfaces is transported in the direction of the moving wave.

11. An electrostatic device as defined in claim 1 wherein said conductive element is flexible.

12. An electrostatic device as defined in claim 1 wherein said dielectric element is flexible.

13. An electrostatic device as defined in claim 1 wherein said voltage source generates voltages that each include zero voltage segments and non-zero voltage segments in a repeating sequence and wherein said voltages are phased such that said zero voltage segments and said non-zero voltage segments move from electrode to electrode and define a direction of gas transport.

14. An electrostatic device as defined in claim 1 wherein the surfaces of said dielectric element and said conductive element have a periphery and wherein said electrodes are located at or near the periphery of the surfaces for transporting gas away from the periphery and thereby limiting leakage of the gas at the periphery of the surfaces.

15. An electrostatic device as defined in claim 1 wherein said electrodes are located between layers of said dielectric element.

16. An electrostatic device comprising:

a conductive element and a dielectric element each having a surface, the surfaces of said dielectric element and said conductive element being closely-spaced or contacting, one of said conductive element and said dielectric element being flexible; and

a plurality of electrodes positioned adjacent to and electrically isolated from the surface of said dielectric element for transporting a gas located between the surfaces of said dielectric element and said conductive element in response to voltages applied to said electrodes, wherein the voltages applied to said electrodes each include attractive voltage segments and non-attractive voltage segments in a repeating sequence and wherein said voltages are phased such that said attractive voltage segments and said non-attractive voltage segments move from electrode to electrode and define a direction of gas transport.

17. An electrostatic device as defined in claim 16 wherein the surfaces of said dielectric element and said conductive element are substantially planar.

18. An electrostatic device as defined in claim 17 wherein said electrodes comprise concentric rings.

19. An electrostatic device as defined in claim 16 wherein each of said electrodes comprises a closed loop.

20. An electrostatic device as defined in claim 16 wherein the surfaces of said dielectric element and said conductive element are substantially cylindrical.

21. An electrostatic device as defined in claim 20 wherein said conductive element comprises a shaft and wherein said dielectric element is flexible.

22. An electrostatic device as defined in claim 21 wherein said shaft has an axis and wherein said electrodes comprise axially-spaced rings.

23. An electrostatic device as defined in claim 16 wherein the voltages applied to said electrodes each include zero voltage segments and non-zero voltage segments in a repeating sequence and wherein said voltages are phased such that said zero voltage segments and said non-zero voltage segments move from electrode to electrode and define a direction of gas transport.

24. An electrostatic device as defined in claim 16 wherein the surfaces of said dielectric element and said conductive element have a periphery and wherein said electrodes are located at or near the periphery of the surfaces for transporting gas away from the periphery and thereby limiting leakage of the gas at the periphery of the surfaces.

25. An electrostatic device as defined in claim 16 wherein said electrodes are located between layers of said dielectric element.

26. An electrostatic device as defined in claim 16 wherein said electrodes include at least three electrodes and wherein the voltages applied to said electrodes produce a moving wave in said flexible element that transports the gas.

27. An electrostatic device for sealing to a surface of a conductive workpiece, comprising:

a dielectric element having a surface, the surfaces of the workpiece and said dielectric element being closely-spaced or contacting when said device is in use, one of the workpiece and said dielectric element being flexible;

a plurality of electrodes positioned adjacent to and electrically isolated from the surface of said dielectric element; and

a voltage source for applying voltages to said electrodes for transporting a gas located between the surfaces of the workpiece and said dielectric element, wherein said voltage source generates voltages that each include attractive voltage segments and non-attractive voltage segments in a repeating sequence and wherein said voltages are phased such that said attractive voltage segments and said non-attractive voltage segments move from electrode to electrode and define a direction of gas transport.

28. An electrostatic device as defined in claim 27 wherein the surface of said dielectric element is substantially planar.

29. An electrostatic device as defined in claim 28 wherein said electrodes comprise concentric rings.

30. An electrostatic device as defined in claim 27 wherein each of said electrodes comprises a closed loop.

31. An electrostatic device as defined in claim 27 wherein the surface of said dielectric element is substantially cylindrical.

32. An electrostatic device as defined in claim 27 wherein said voltage source generates voltages that each include zero voltage segments and non-zero voltage segments in a repeating sequence and wherein said voltages are phased such that said zero voltage segments and said non-zero voltage segments move from electrode to electrode and define a direction of gas transport.

33. An electrostatic device as defined in claim 27 wherein the surface of said dielectric element has a periphery and wherein said electrodes are located at or near the periphery of the surface for transporting gas away from the periphery and thereby limiting leakage of gas at the periphery of the surface.

34. An electrostatic device as defined in claim 27 wherein said electrodes are located between layers of said dielectric element.

35. A method for transporting a gas, comprising the steps of:

providing a conductive element and a dielectric element having surfaces that are closely-spaced or contacting, one of said conductive element and said dielectric element being flexible;

positioning a plurality of electrodes adjacent to and electrically isolated from the surface of said dielectric element; and

applying voltages to said electrodes for transporting a gas located between the surfaces of said conductive element and said dielectric element.

36. A method as defined in claim 35 wherein the step of applying voltages comprises generating voltages that each include attractive voltage segments and non-attractive voltage segments in a repeating sequence and phasing said voltages such that said attractive voltage segments and said non-attractive voltage segments move from electrode to electrode and define a direction of gas transport.

37. A method as defined in claim 35 wherein the step of applying voltages comprises generating voltages that each include zero voltage segments and non-zero voltage segments in a repeating sequence and phasing said voltages such that said zero voltage segments and said non-zero voltage segments move from electrode to electrode and define a direction of gas transport.

38. A method as defined in claim 35 wherein the step of applying voltages to said electrodes includes applying voltages for electrostatically clamping said conductive element to said dielectric element.

39. An electrostatic device comprising:

a conductive element and a dielectric element each having a surface, the surfaces of said dielectric element and said conductive element being closely-spaced or contacting, one of said conductive element and said dielectric element being flexible;

a plurality of electrodes positioned adjacent to and electrically isolated from the surface of said dielectric element; and

means for applying voltages to said electrodes for transporting a gas located between the