External force measuring device
First Claim
1. An external force measuring device comprising:
- a substrate;
plural masses opposed to and spaced from the substrate, arranged in the Y-axial direction of three orthogonal axial directions, X-, Y-, and Z-axial directions, such as to be vibratable in the X-axial direction at opposite phases to each other;
a vibration generator for vibrating the plural masses;
supporting beams connecting the respective masses displaceably in the X-axial direction;
fixing portions provided between the supporting beams and the substrate; and
an external force detector for detecting, a displacement of the respective masses in one of the Y- and Z-axial directions, caused when an angular velocity or an acceleration acts on the respective masses.
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Accused Products
Abstract
A center mass and a pair of outer masses are connected to each other via supporting beams displaceable in the X-axial direction. When an angular velocity sensor is operated, a vibration generator causes masses to vibrate substantially at opposite phases to each other with respect to the X-axial direction. In this state, if an angular velocity on the Y-axis is added, the displacements of the masses, caused when the masses are displaced in the Z-axial direction, are detected as the angular velocity. Moreover, fixing portions, formed on a substrate, support the nodes of the supporting beams corresponding to the nodes to suppress vibration of the masses from being transmitted to the substrate.
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Citations
14 Claims
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1. An external force measuring device comprising:
- a substrate;
plural masses opposed to and spaced from the substrate, arranged in the Y-axial direction of three orthogonal axial directions, X-, Y-, and Z-axial directions, such as to be vibratable in the X-axial direction at opposite phases to each other;
a vibration generator for vibrating the plural masses;
supporting beams connecting the respective masses displaceably in the X-axial direction;
fixing portions provided between the supporting beams and the substrate; and
an external force detector for detecting, a displacement of the respective masses in one of the Y- and Z-axial directions, caused when an angular velocity or an acceleration acts on the respective masses. - View Dependent Claims (2, 3, 4, 5, 11, 14)
- a substrate;
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6. An external force measuring device comprising:
- a substrate;
a first mass opposed to and spaced from the substrate, arranged in the Y-axial direction of three orthogonal axial directions, X-, Y-, and Z-axial directions, such as to be vibratable in the X-axial direction;
a vibration generator for vibrating the plural masses;
second masses provided on both of the sides in the Y-axial direction of the first mass so as to sandwich the first mass and to be vibrated in the X-axial direction by the vibration generator;
third masses positioned between the first mass and the second masses so as to surround the first mass;
supporting beams connecting the second masses to each other displaceably in the X-axial direction;
connecting portions connecting the third masses to the supporting beams;
mass-supporting beams connecting the first mass to the third masses displaceably in the Y-axial direction;
fixing portions provided between the substrate and the supporting beams and connecting the supporting beams to the substrate; and
an external force detector for detecting a displacement in the Y-axial direction of the first mass caused when an angular velocity acts on the first mass, said first and third masses, and said second and fourth masses being vibrated at opposite phases to each other. - View Dependent Claims (7, 8, 12)
- a substrate;
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9. An external force measuring device comprising:
- a substrate;
a first mass opposed to and spaced from the substrate such as to be vibratable along the X-axial direction of three orthogonal axial directions is, X-, Y-, and Z-axial directions;
second masses provided on both of the sides in the Y-axial direction of the first mass so as to sandwich the first mass such as vibratable in the X-axial direction;
third masses positioned between the first mass and the second masses so as to surround the first mass;
fourth masses surrounding the second masses;
a vibration generator for vibrating the first mass, the second, third, and fourth masses;
supporting beams connecting the fourth masses to each other displaceably in the X-axial direction;
connecting portions connecting the third masses to the supporting beams;
first mass supporting beams connecting the first mass to the third masses displaceably in the Y-axial direction;
second mass supporting beams connecting the second masses to the fourth masses displaceably in the Y-axial direction;
fixing portions provided between the substrate and the supporting beams and connecting the supporting beams to the substrate; and
an external force detector for detecting, the displacement in the Y-axial direction of the first and second masses, caused when an angular velocity or acceleration acts on the first and second masses, said first and third masses, and said second and fourth masses being vibrated at opposite phases to each other. - View Dependent Claims (10, 13)
- a substrate;
Specification