Coating glass
First Claim
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1. A process for the production of an electrically conductive low emissivity coating on a glass substrate, comprising, in sequence:
- (a) providing a glass substrate having at least one surface;
(b) depositing a reflective metal layer above a surface of the glass substrate;
(c) providing an atmosphere for reactive sputtering of a metal oxide, said atmosphere containing methane as an oxygen scavenger; and
(d) depositing a metal oxide layer over the reflective metal layer by reactive sputtering in said atmosphere.
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Abstract
A process for the production of a low emissivity coating on a glass substrate comprising, in sequence, depositing a reflective metal layer, and reactively sputtering a metal oxide layer over the metal layer in the presence of an oxygen scavenger. The oxygen scavenger is preferably a hydrocarbon, in particular methane. The metal oxide layer may comprise tin oxide, zinc oxide, tungsten oxide and other metal oxides are also likely to be suitable.
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Citations
13 Claims
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1. A process for the production of an electrically conductive low emissivity coating on a glass substrate, comprising, in sequence:
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(a) providing a glass substrate having at least one surface;
(b) depositing a reflective metal layer above a surface of the glass substrate;
(c) providing an atmosphere for reactive sputtering of a metal oxide, said atmosphere containing methane as an oxygen scavenger; and
(d) depositing a metal oxide layer over the reflective metal layer by reactive sputtering in said atmosphere. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification