Nanoporous silicone resins having low dielectric constants
First Claim
1. A method for making a nanoporous silicone resin coating on a substrate comprising the steps of(a) coating on to a substrate a silicone resin comprising the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR1)4, where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of a hydrosilane described by formula
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Abstract
Nanoporous silicone resins and silicone resin films having low dielectric constants and a method for preparing such nanoporous silicone resins. The silicone resin comprises the reaction product of a mixture comprising
(A) 15-70 mol % of a tetraalkoxysilane described by formula
where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms,
(B) 12 to 60 mol % of a hydrosilane described by formula
where each X is an independently selected hydrolyzable substituent,
(C) 15 to 70 mole percent of an organotrialkoxysilane described by formula
where R2 is a hydrocarbon group comprising about 8 to 24 carbon atoms or a substituted hydrocarbon group comprising a hydrocarbon chain having about 8 to 24 carbon atoms and each R3 is an independently selected alkyl group comprising 1 to about 6 carbon atoms; in the presence of
(D) water,
(E) hydrolysis catalyst, and
(F) organic solvent for the reaction product.
The silicone resin is cured and heated in an inert atmosphere at a temperature sufficient to effect thermolysis of carbon-carbon bonds of the R2 groups thereby forming a nanoporous silicone resin.
282 Citations
33 Claims
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1. A method for making a nanoporous silicone resin coating on a substrate comprising the steps of
(a) coating on to a substrate a silicone resin comprising the reaction product of a mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR1)4, where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of a hydrosilane described by formula
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20. A method for making a nanoporous silicone resin comprising the steps of
(I) forming a reaction product by reacting a reaction mixture comprising (A) 15-70 mol % of a tetraalkoxysilane described by formula Si(OR1)4, where each R1 is an independently selected alkyl group comprising 1 to about 6 carbon atoms, (B) 12 to 60 mol % of a hydrosilane described by formula
Specification