High temperature superconductor Josephson junction element and manufacturing method for the same
First Claim
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1. A Josephson junction comprising:
- a first superconductive layer formed on a substrate and having an inclination portion;
an insulating film formed on said first superconductive layer and having an inclination portion following to said inclination portion of said first superconductive layer;
a barrier layer formed on said inclination portion of said first superconductive layer;
a second superconductive layer formed on said inclination portion of said insulating film and said inclination portion of said barrier layer;
wherein said barrier layer has a perovskite structure; and
wherein a material of said barrier layer has a lattice constant from 0.41 nm to 0.43 nm.
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Abstract
In a method of manufacturing a Josephson junction, a first superconductive layer is formed on a substrate. An insulating film is formed on the first superconductive layer. The insulating film is etched to have an inclination portion. The first superconductive layer is etched using the etched insulating film as a mask, to have an inclination portion. A barrier layer is formed on a surface of the inclination portion of the first superconductive layer. A second superconductive layer is formed on the barrier layer and the inclination portion of the insulating layer.
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Citations
11 Claims
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1. A Josephson junction comprising:
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a first superconductive layer formed on a substrate and having an inclination portion;
an insulating film formed on said first superconductive layer and having an inclination portion following to said inclination portion of said first superconductive layer;
a barrier layer formed on said inclination portion of said first superconductive layer;
a second superconductive layer formed on said inclination portion of said insulating film and said inclination portion of said barrier layer;
wherein said barrier layer has a perovskite structure; and
wherein a material of said barrier layer has a lattice constant from 0.41 nm to 0.43 nm. - View Dependent Claims (2, 7, 10)
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3. A Josephson junction comprising:
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a first superconductive layer formed on a substrate and having an inclination portion;
an insulating film formed on said first superconductive layer and having an inclination portion following to said inclination portion of said first superconductive layer;
a barrier layer formed on said inclination portion of said first superconductive layer;
a second superconductive layer formed on said inclination portion of said insulating film and said inclination portion of said barrier layer; and
wherein a composition of said barrier layer is Y1-xBa1CuxOy (x being in a range of 0 to
1).- View Dependent Claims (4, 5, 8, 9, 11)
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6. A Josephson junction device comprising:
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a first superconductive layer formed on a substrate;
2 or more interlayer insulating films provided on said first superconductive layer apart from each other; and
2 or more second superconductive layers respectively formed on said interlayer insulating layers;
wherein each of said interlayer insulating films has a film thickness equal to or less than 2 nm.; and
said first superconductive layer and said second superconductive layer are YBaCuO superconductive layers.
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Specification