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Single crystal silicon micromirror and array

  • US 6,541,831 B2
  • Filed: 01/18/2001
  • Issued: 04/01/2003
  • Est. Priority Date: 01/18/2000
  • Status: Expired due to Term
First Claim
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1. A micromirror, comprising:

  • a substrate having a through cavity;

    a micromirror platform fabricated from said substrate and located in said cavity;

    an actuator including a comb drive fabricated from said substrate and suspended in said cavity for motion with respect to said substrate; and

    at least one support connected to suspend said platform from said actuator for motion with the actuator.

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  • 3 Assignments
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