Add-drop optical switches including parallel fixed and movable reflectors and methods of fabricating same

• US 6,542,656 B1
• Filed: 04/05/2000
• Issued: 04/01/2003
• Est. Priority Date: 04/05/2000
• Status: Expired due to Term

• Current Assignee: Memscap Incorporated
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Hill, Edward A.
• Primary Examiner(s): Bovernick, Rodney
• Assistant Examiner(s): STAHL, MICHAEL J
• Application Number:
  US09/543,539
• Time in Patent Office: 1,091 Days
• Field of Search: 385/18, 385/24, 385/16, 385/17, 385/19, 385/14, 216/2, 216/24, 264/1.24, 264/1.25
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

Add-drop optical switches include fixed reflectors, such as fixed mirrors, and movable reflectors, such as movable mirrors, wherein none of the fixed reflectors and none of the movable reflectors are oriented orthogonal to one another on a substrate when the movable reflectors that provide the add-drop functionality are in a radiation reflecting position. In preferred embodiments, each of the fixed and movable reflectors is oriented parallel to or at a 70° angle to, the remaining fixed and movable reflectors when the movable reflectors are in the radiation reflecting position. Most preferably, the fixed reflectors and the movable reflectors all are oriented on the substrate in parallel when the movable reflectors are in the radiation reflecting position. By providing these orientations of fixed and movable reflectors, add-drop optical switches may be fabricated on silicon substrates using wet etching along crystallographic planes. High performance add-drop optical switches thereby may be provided.

Claims

1. An add-drop optical switch comprising:

a substrate;

an ADD optical path on the substrate that receives optical radiation;

an IN optical path on the substrate that receives optical radiation;

an OUT optical path on the substrate that transmits optical radiation;

a DROP optical path on the substrate that transmits optical radiation;

a plurality of fixed reflectors that are fixedly coupled to the substrate, none of which are oriented orthogonal to one another on the substrate; and

a plurality of movable reflectors that are movably coupled to the substrate for movement to and away from a radiation reflecting position, none of which are oriented orthogonal to one another on the substrate when in the radiation reflecting position;

wherein the fixed reflectors and the movable reflectors are arranged on the substrate to selectively couple the IN optical path to the OUT optical path, to selectively couple the IN optical path to the DROP optical path and to selectively couple the ADD optical path to the OUT optical path;

wherein the plurality of fixed reflectors comprise a first and a second fixed reflector and wherein the plurality of movable reflectors comprise a first and a second movable reflector;

wherein the IN optical path and the OUT optical path are collinear and wherein the first and second movable reflectors are arranged between the IN optical path and the OUT optical path when the first and second movable reflectors are in the radiation reflecting position; and

wherein the first and second movable reflectors are arranged between the IN optical path and the OUT optical path, at a 45°

angle thereto and at a 65°

angle thereto, respectively, when the first and second movable reflectors are in the radiation reflecting position.

2. An add-drop optical switch according to claim 1 wherein the first fixed reflector is between the DROP optical path and the first movable reflector and wherein the second fixed reflector is between the ADD optical path and the second movable reflector.

3. An add-drop optical switch according to claim 1 wherein the IN and ADD optical paths extend to a first side of the substrate and wherein the OUT and DROP optical paths extend to a second side of the substrate that is opposite the first side.

4. An add-drop optical switch comprising:

a substrate;

an ADD optical path on the substrate that receives optical radiation;

an IN optical path on the substrate that receives optical radiation;

an OUT optical path on the substrate that transmits optical radiation;

a DROP optical path on the substrate that transmits optical radiation;

a plurality of fixed reflectors that are fixedly coupled to the substrate, none of which are oriented orthogonal to one another on the substrate; and

a plurality of movable reflectors that are movably coupled to the substrate for movement to and away from a radiation reflecting position, none of which are oriented orthogonal to one another on the substrate when in the radiation reflecting position;

wherein the fixed reflectors and the movable reflectors are arranged on the substrate to selectively couple the IN optical path to the OUT optical path, to selectively couple the IN optical path to the DROP optical path and to selectively couple the ADD optical path to the OUT optical path;

wherein the IN optical path and the OUT optical path are collinear and wherein the first and second movable reflectors are arranged between the IN optical path and the OUT optical path when the first and second movable reflectors are in the radiation reflecting position;

wherein the first fixed reflector is between the DROP optical path and the first movable reflector and wherein the second fixed reflector is between the ADD optical path and the second movable reflector; and

wherein the first fixed reflector is between the DROP optical path and the first movable reflector at a 45°

angle to the DROP optical path and wherein the second fixed reflector is between the ADD optical path and the second movable reflector at a 65°

angle to the ADD optical path.

5. An optical switch comprising:

a substrate comprising monocrystalline silicon;

a plurality of parallel input optical paths on the substrate that receive optical radiation;

a plurality of parallel output optical paths on the substrate that transmit optical radiation and that are parallel to the plurality of parallel input optical paths;

a plurality of fixed reflectors that are fixedly coupled to the substrate; and

a plurality of movable reflectors that are movably coupled to the substrate for movement to and away from a radiation reflecting position;

wherein the plurality of fixed reflectors and the plurality of movable reflectors are arranged on the substrate to selectively couple the plurality of input optical paths to the plurality of output optical paths and wherein each of the fixed and movable reflectors is oriented along a crystallographic plane of the monocrystalline silicon when the movable reflectors are in the radiation reflecting position; and

wherein at least one of the input optical paths is oriented on the substrate at a 65°

angle relative to at least one of the fixed reflectors or the movable reflectors in the radiation reflecting position.

6. An optical switch according to claim 5 wherein all of the fixed and movable reflectors are oriented in parallel when the movable reflectors are in the radiation reflecting position.

7. An optical switch according to claim 5 wherein none of the fixed and movable reflectors are oriented orthogonal to one another on the substrate.

8. An optical switch comprising:

a substrate comprising monocrystalline silicon;

a plurality of parallel input optical paths on the substrate that receive optical radiation;

a plurality of parallel output optical paths on the substrate that transmit optical radiation and that are parallel to the plurality of parallel input optical paths;

a plurality of fixed reflectors that are fixedly coupled to the substrate; and

a plurality of movable reflectors that are movably coupled to the substrate for movement to and away from a radiation reflecting position;

wherein the plurality of fixed reflectors and the plurality of movable reflectors are arranged on the substrate to selectively couple the plurality of input optical paths to the plurality of output optical paths and wherein each of the fixed and movable reflectors is oriented along a crystallographic plane of the monocrystalline silicon when the movable reflectors are in the radiation reflecting position; and

wherein at least one of the output optical paths is oriented on the substrate at a 65°

angle relative to at least one of the fixed reflectors or the movable reflectors in the radiation reflecting position.