Form measuring sensor and form measuring instrument

• US 6,543,150 B2
• Filed: 04/27/2001
• Issued: 04/08/2003
• Est. Priority Date: 05/01/2000
• Status: Active Grant

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: Matsumiya, Sadayuki, Yoshioka, Susumu
• Primary Examiner(s): Gutierrez, Diego
• Assistant Examiner(s): Guadalupe, Yaritza
• Application Number:
  US09/842,919
• Publication Number:
  US 20010034948A1
• Time in Patent Office: 711 Days
• Field of Search: 335/53, 335/03, 33D/IG.13, 335/49, 335/51, 335/56, 335/58, 335/59, 335/61, 335/42, 331/99.R, 331/99.B, 335/54
• US Class Current: 33/553
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor
• CPC Class Codes: Y10S 33/13 Wire and strain gauges

Abstract

A form measuring sensor (33) includes a stylus (40), a body (60) for holding the stylus (40) through an adaptor (50), the adaptor (50) including a stylus attachment (51) for the stylus (40) to be attached, a body attachment (52) to be attached to the body (60), and an elastically deformable connector (53) for connecting the stylus attachment (51) and the body attachment (52), where the sensor (33) and a threaded hole (100) are relatively moved to cause an elastic deformation of the connector (53) allowing a displacement of the stylus (40) in accordance with surface configuration of the threaded hole (100), so that the elastic deformation of the connector (53) is detected by a strain gauge (71) to detect the displacement of a contact portion (42A) to collect continuous configuration data of the threaded hole (100) within a short period of time.

Claims

1. A form measuring sensor, comprising:

a stylus having a contact portion to be in contact with a workpiece surface at a first end;

a body for holding the stylus through an adaptor, the adaptor including a stylus attachment for a second end of the stylus to be attached, a body attachment to be attached to the body and an elastically deformable connector for connecting the stylus attachment and the body attachment, the connector elastically deforming to allow a displacement of the stylus and the stylus attachment relative to the body attachment in accordance with a configuration of the surface of the workpiece; and

a deformation sensor disposed to detect the elastic deformation of the connector, wherein the stylus is formed in approximate L-shape and includes a first arm extending along the surface of the workpiece with an end attached to the stylus attachment, and a second arm extending substantially orthogonal with the other end of the first arm and having the contact portion at an end thereof,

wherein the body is relatively moved along the surface of the workpiece while the contact portion of the stylus keeps in contact with the surface of the workpiece, and

wherein the contact portion of the stylus and the connector are disposed on an identical line approximately parallel to the relative movement direction.

2. The form measuring sensor according to claim 1, wherein the contact portion of the stylus is disposed on a center line of the connector approximately parallel to the relative movement direction.

3. The form measuring sensor according to claim 1, wherein the deformation sensor includes a strain gauge attached to the connector.

4. The form measuring sensor according to claim 1, wherein the stylus is formed of a piano wire.

5. The form measuring sensor according to claim 1, wherein the form measuring sensor measures a thread form.

6. A form measuring instrument having a form measuring sensor according to claim 1, comprising:

a holder for the form measuring sensor to be detachably attached;

a relative movement mechanism for relatively moving the holder along a surface of the workpiece; and

a controller for controlling the relative movement mechanism.

7. The form measuring instrument according to claim 6, wherein the form measuring sensor measures a form of a thread.

8. The form measuring instrument according to claim 7, wherein a machining tool for threading the workpiece to form the thread is detachably attached to the holder.

9. The form measuring instrument according to claim 7, wherein a machining tool for forming a hole before threading of the thread on the workpiece is detachably attached to the holder.

10. A form measuring instrument having a form measuring sensor according to claim 1, comprising:

a holder for the form measuring sensor to be detachably attached;

a surface-direction relative movement mechanism for relatively moving the holder along a surface of the workpiece;

a crosswise relative movement mechanism for relatively moving the holder in a direction intersecting the workpiece surface; and

a controller for controlling the surface-direction relative movement mechanism and the crosswise relative movement mechanism, the controller controlling the crosswise relative movement mechanism so that an output of the deformation sensor becomes always constant.

11. The form measuring instrument according to claim 10, wherein the form measuring sensor measures a thread form.