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High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array

  • US 6,543,286 B2
  • Filed: 06/19/2001
  • Issued: 04/08/2003
  • Est. Priority Date: 01/26/2001
  • Status: Expired due to Term
First Claim
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1. A method of controlling an electrostatic actuator including a first variable gap capacitor including first and second electrodes opposed to each other and attached respectively to first and second mechanical elements movable relatively to each other, comprising:

  • selecting a delay producing a relative position between said two mechanical elements;

    applying to said first electrode a first drive signal having a drive frequency; and

    applying to said second electrode a second drive signal having said drive frequency but delayed from said first drive signal by said delay.

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