Device for the production of homogenous microwave plasma

• US 6,543,380 B1
• Filed: 02/01/2000
• Issued: 04/08/2003
• Est. Priority Date: 06/23/1997
• Status: Expired due to Fees

• Current Assignee: Hildegard Sung-Spitzl
• Original Assignee: Hildegard Sung-Spitzl
• Inventors: Sung-Spitzl, Hildegard
• Primary Examiner(s): Lund, Jeffrie R.
• Assistant Examiner(s): Zervigon, Rudy
• Application Number:
  US09/446,569
• Time in Patent Office: 1,162 Days
• Field of Search: 118/723.MR, 118/723.MA, 118/723.MW, 118/723.MP, 118/725, 118/723.E, 118/719, 118/722, 118/723.AN, 118/723.FI, 118/723.I, 118/724, 156/345, 204/192.32, 204/168, 204/298.16, 204/298.2, 204/298.34, 204/298.37, 216/67, 216/70, 219/121.4, 219/121.41, 219/121.43, 219/121.52
• US Class Current: 118/723.0MW
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32211 Means for coupling power to the plasma

Abstract

A device for generating microwave plasmas and having a microwave generator, a chamber feeding microwaves, and a plasma chamber with receptacles, if appropriate, is proposed, the chamber being of cylindrical construction. The plasma chamber preferably comprises the cylindrical chamber completely or partially. Coupling points are arranged in the common wall, preferably as slot couplers.

Claims

1. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein the plasma chamber and the feeding chamber being the same length.

2. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein said feeding chamber comprises end faces, and wherein at least one of said end faces is adjustable.

3. The device of claim 2 wherein said plasma chamber comprises end faces, and wherein at least one of said end faces of said plasma chamber is also adjustable.

4. The device of claim 2 wherein said end face(s) is/are adjustable by rotation.

5. The device of claim 2 wherein said end face(s) is/are adjustable by shifting along a common axis.

6. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein said plasma chamber comprises end faces, and wherein at least one of the end faces of the plasma chamber is adjustable.

7. The device of claim 6 wherein said end face(s) is/are adjustable by rotation.

8. The device of claim 6 wherein said end face(s) is/are adjustable by shifting along a common axis.

9. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein said wall is, at least in part, constructed from the group consisting of a double wall, a threefold wall and a multiple wall, and wherein the wall with the coupling points is arranged displaceably.

10. The device of claim 9 wherein the wall with coupling points is arranged rotatably.

11. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein said wall is, at least in part, constructed as a double, threefold or multiple wall, and wherein the wall with the coupling points is arranged rotatably.

12. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber, and wherein said coupling points are adjustable or movable.

13. The device of claim 12 wherein at least one of said chambers comprises at least one adjustable end face which is provided with means by which said coupling points can be adjusted.

14. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

wherein said wall is, at least in part, constructed as a double, threefold or multiple wall, and wherein at least one of these walls is arranged displaceably.

15. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber, and wherein said wall is, at least in part, constructed as a double, threefold or multiple wall, and wherein at least one of these walls is arranged rotatably.

16. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

the plasma chamber and the feeding chamber having a common direction and being the same length.

17. The device of claim 16 wherein said common direction is the direction in the z axis.

18. The device of claim 16 wherein the plasma chamber and the feeding chamber are of different lengths.

19. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

the plasma chamber and the feeding chamber being the same length and wherein the plasma chamber encloses the feeding chamber.

20. A device for generating microwave plasmas, said device comprising:

a microwave generator;

a microwave feeding chamber of cylindrical design;

a plasma chamber;

a common wall between said feeding chamber and said plasma chamber; and

a plurality of coupling points which are located within said wall and through which the microwave energy is conveyed from said feeding chamber into said plasma chamber;

the plasma chamber and the feeding chamber being the same length, wherein said plasma chamber and said feeding chamber comprise end faces and wherein said microwave generator is arranged in or near one of said end faces or a wall of one of said chambers.