Heater with detachable ceramic top plate

• US 6,544,340 B2
• Filed: 12/08/2000
• Issued: 04/08/2003
• Est. Priority Date: 12/08/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yudovsky, Joseph
• Primary Examiner(s): Mills, Gregory
• Assistant Examiner(s): Kackar, Ram N
• Application Number:
  US09/733,374
• Publication Number:
  US 20020069820A1
• Time in Patent Office: 851 Days
• Field of Search: 118/715, 118/725, 118/728, 118/729, 118/730, 118/500
• US Class Current: 118/728
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/4585 Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A substrate support assembly for supporting a substrate during processing is provided. In one embodiment, a support assembly includes a support plate supported by a second plate. The support plate has a first side and a second side. The second side of the support has a recess formed therein. The second plate includes a boss extending from the second plate which mates with the recess of the support plate. Other embodiments include a flange that extends from the support plate that supports a shadow ring and a plurality of sleeves extending from the support plate for guiding lift pins.

Claims

1. A support assembly for supporting a workpiece comprising:

a support plate having a first side and a second side, the second side having a recess formed therein;

a plurality of sleeves projecting from the second side of the support plate, the sleeves and support plate comprising a single body of material; and

a plurality of holes passing through the sleeve coupling the first side and the second side of the support plate, each hole adapted to receive a lift pin;

a second plate disposed proximate the second side of the support plate, wherein the support plate is not fastened to the second plate during operation of the support assembly; and

a boss extending from the second plate and mating with the recess of the support plate.

2. The support assembly of claim 1, wherein the second plate further comprises a plurality of holes, each hole having a portion of the sleeve extending thereinto.

3. The support assembly of claim 1, wherein the first side of the support plate further comprises one or more recessed areas.

4. The support assembly of claim 3, wherein the support plate further comprises one or more apertures fluidly coupled to the recessed areas.

5. The support assembly of claim 4, wherein the second plate further comprises a port fluidly coupled to the apertures disposed in the support plate.

6. The support assembly of claim 5, wherein the second plate further comprises:

a plurality of radially extending channels fluidly coupled between the port disposed in the second plate and the apertures disposed in the support plate.

7. The support assembly of claim 1, wherein the second plate is comprised of aluminum.

8. The support assembly of claim 1, wherein the support plate is comprised of ceramic.

9. The support assembly of claim 1, wherein the support plate is comprised of aluminum nitride.

10. The support assembly of claim 1, wherein the support plate further comprises a circumscribing flange.

11. The support assembly of claim 10, further comprising:

a purge ring disposed on the flange, the purge ring adapted to direct a fluid adjacent a perimeter of the workpiece.

12. The support assembly of claim 11, wherein the flange further comprises one or more holes disposed therethrough and fluidly coupled to a channel defined between the purge ring and the support plate.

13. The support assembly of claim 12, wherein the second plate further comprises one or more ports disposed therein and fluidly coupled to the channel.

14. The support assembly of claim 13, wherein the second plate further comprises a plurality of radially extending channels formed in a surface of the second plate, the channels fluidly coupled between the port disposed in the second plate and the apertures disposed in the support plate.

15. The support assembly of claim 1, wherein the second plate further comprises a resistive heater disposed therein.

16. The support assembly of claim 1, further comprising a heating element disposed adjacent to or within the support plate.

17. A support assembly for supporting a workpiece comprising;

a support plate having a first side and a second side, the second side having a plurality of sleeves extending therefrom, the sleeve and support plate comprising a single body of material; and

a second plate disposed proximate the second side of the support plate, the second plate having a plurality of holes disposed therein, each sleeve extending at least partially into a respective one of the holes, each hole adapted to receive a lift pin.

18. The support assembly of claim 17, wherein the second plate further comprises a boss extending from the second plate and mating with a recess disposed in the support plate.

19. The support assembly of claim 17, wherein the support plate includes a flange extending from the support plate'"'"'s perimeter.

20. The support assembly of claim 19, further comprising:

a purge ring disposed on the flange, the purge ring adapted to direct a fluid adjacent a perimeter of the workpiece.

21. The support assembly of claim 20, wherein the flange further comprises one or more holes disposed therethrough and fluidly coupled to a channel defined between the purge ring and the support plate.

22. The support assembly of claim 21, wherein the second plate further comprises one or more ports disposed therein and fluidly coupled to the channel.

23. The support assembly of claim 22, wherein the second plate further comprises a plurality of radially extending channels formed in a surface of the second plate, the channels coupled between the port then the apertures disposed in the support plate.

24. The support assembly of claim 17, further comprising at least one lift pin disposed through one sleeve and extending through side second plate.

25. The support assembly of claim 17, wherein the support plate further comprises:

a plurality of recesses disposed in the first side; and

a plurality of holes disposed through the ceramic second plate, each of the recesses having at least one of the holes fluidly coupled thereto.

26. The support assembly of claim 25, wherein the second plate further comprises:

a port disposed through the second plate; and

a plurality of channels radially disposed in a surface of the second plate, the channels fluidly coupling the port and the holes disposed in the support plate.

27. A support assembly for supporting a workpiece comprising:

a ceramic support plate having a flange, a first side and a second side, the flange extending from a perimeter of the support plate;

a plurality of recesses formed in the first side of the support plate;

one or more apertures coupling each recess to the second side of the support plate;

a plurality of sleeves protruding from the second side of the support plate, the sleeves and support plate comprises a single body of material; and

a plurality of holes passing through the sleeve coupling the first side and the second side of the support plate, each hole adapted to receive a lift pin;

a second plate proximate the second side of the support plate and having a vacuum port disposed therethrough;

at least one radial channel formed between the support plate and second plate coupling the vacuum port and the apertures; and

a purge ring disposed on the flange and defining a channel between the ring and the support plate, the channel adapted to flow a fluid adjacent a perimeter of the workpiece.

28. The support assembly of claim 27, wherein the second plate further comprises a plurality of holes, each hole having a portion of the sleeve extending thereinto.

29. The support assembly of claim 27, wherein the first side of the support plate further comprises one or more recessed areas.

30. The support assembly of claim 29, wherein the support plate further comprises one or more apertures fluidly coupled to the recessed areas.

31. The support assembly of claim 30, wherein the second plate further comprises a port fluidly coupled to the apertures disposed in the support plate.

32. The support assembly of claim 29, wherein the second plate further comprises a plurality of radially extending channels coupled between the port in the second plate and the apertures disposed in the support plate.

33. The support assembly of claim 27, wherein the second plate is comprised of aluminum.

34. The support assembly of claim 27, wherein the support plate is comprised of aluminum nitride.

35. The support assembly of claim 27, wherein the support plate further comprises a circumscribing flange.

36. The support assembly of claim 27, wherein the flange further comprises one or more holes disposed therethrough and fluidly coupled to a channel defined between the purge ring and the support plate.

37. The support assembly of claim 36, wherein the second plate further comprises one or more ports disposed therein and fluidly coupled to the channel.

38. The support assembly of claim 37, wherein the second plate further comprises a plurality of radially extending channels formed in a surface of the second plate, the channels coupled between the port disposed in the second plate and the apertures disposed in the support plate.

39. The support assembly of claim 27, wherein the second plate further comprises a resistive heater disposed therein.

40. The support assembly of claim 27, further comprising a heating element disposed adjacent to or within the second plate.

41. The support assembly of claim 27, wherein the second side of the ceramic support plate further comprises:

a recess formed therein; and

the second plate further comprises;

a boss extending from the second plate and mating with the recess of the support plate.

42. A support assembly for supporting a workpiece comprising:

a ceramic support plate having a flange, a first side and a second side, the flange extending from a perimeter of the flange;

the second side having a recess formed therein;

a plurality of sleeves protruding from the second side of the support plate, the sleeves and support plate being a singular structure;

a metallic conductive plate disposed against the second side of the support plate and having a plurality of bores formed therein, each one of the bores mating respectively with one of sleeves of the support plate;

a boss extending from the metallic plate and mating with the recess of the support plate; and

a purge ring disposed on the flange and defining a channel between the ring and the support plate, the channel adapted to flow a fluid adjacent a perimeter of the workpiece.