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Heater with detachable ceramic top plate

  • US 6,544,340 B2
  • Filed: 12/08/2000
  • Issued: 04/08/2003
  • Est. Priority Date: 12/08/2000
  • Status: Expired due to Term
First Claim
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1. A support assembly for supporting a workpiece comprising:

  • a support plate having a first side and a second side, the second side having a recess formed therein;

    a plurality of sleeves projecting from the second side of the support plate, the sleeves and support plate comprising a single body of material; and

    a plurality of holes passing through the sleeve coupling the first side and the second side of the support plate, each hole adapted to receive a lift pin;

    a second plate disposed proximate the second side of the support plate, wherein the support plate is not fastened to the second plate during operation of the support assembly; and

    a boss extending from the second plate and mating with the recess of the support plate.

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