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Process monitor with statistically selected ring oscillator

  • US 6,544,807 B1
  • Filed: 11/03/2000
  • Issued: 04/08/2003
  • Est. Priority Date: 11/03/2000
  • Status: Active Grant
First Claim
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1. A process monitor comprising:

  • a test circuit formed on a product die having a distribution of cell types that is substantially identical to that of a plurality of circuits formed on the product die wherein the test circuit comprises a net chain delay circuit.

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