System and method for the microscopic generation of object images

• US 6,545,265 B1
• Filed: 04/14/2000
• Issued: 04/08/2003
• Est. Priority Date: 05/30/1998
• Status: Expired due to Fees

• Current Assignee: CARL Zeiss JENA GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss JENA GmbH (Carl-Zeiss-Stiftung)
• Inventors: Muehlig, Peter, Czarnetzki, Norbert
• Primary Examiner(s): Allen, Stephone B.
• Application Number:
  US09/463,722
• Time in Patent Office: 1,089 Days
• Field of Search: 250/234-236, 250/486.1, 359/368
• US Class Current: 250/234
• CPC Class Codes: G02B 21/0044 moving apertures, e.g. Nipkow disks, rotating lens arrays
• CPC Class Codes: G02B 21/0072 details concerning resolution or correction, including general design of CSOM objectives
• CPC Class Codes: G02B 21/008 Details of detection or image processing, including general computer control

Abstract

A method is disclosed for mixing pairs of confocal images and different arrangements for fast generation of parallel confocal images and the combination thereof in real time. The method is used for improving contrast and resolution in confocal images. The suggested arrangements point to some possibilities for a meaningful application of the method for image mixing in parallel confocal single-beam or double-beam methods for the generation of highly resolved images in real time for a wide variety of different applications, especially also for material inspection. By combining at least two confocal images, a resolution of the fine structure of the object is achieved in the mixed image. Contrast, lateral resolution and depth resolution are improved in the mixed image of the object to be examined, which can also be a phase object. Further, the method permits the generation of very highly resolved three-dimensional digital images of optical objects to be examined.

Claims

1. An arrangement for generating object images in a microscope, comprising:

means for recording at least two reflected confocal images of an object with distinguishable optical object information with respect to image pixels and for storing them one after the other; and

means for combining the recorded and digitized images in a pixel-exact manner and for storing a mixed image formed in this way;

wherein a parallel confocal generation of raster images of the object is carried out via different pinhole arrangements so that each initial image of the object has a different confocal resolution.

2. The arrangement according to claim 1, wherein the mixed image is displayed on a picture screen or processed by image processing apparatus.

3. The arrangement according to claim 1, including means for generating parallel confocal incident illumination bundles in or on the object.

4. The arrangement according to claim 1, wherein different pinhole arrangements are used one after the other with respect to time for image generation.

5. The arrangement according to claim 1, wherein pinhole arrangements are displaced for confocal scanning of the object.

6. The arrangement according to claim 1, wherein the object itself is displaced for confocai scanning of the object.

7. The arrangement according to claim 1, wherein, in the case of a moving object, different and stationary pinhole arrangements are used for image recording of the same object area.

8. The arrangement according to claim 1, with pinhole arrangements arranged on a revolving strip.

9. The arrangement according to claim 1, with different pinhole arrangements arranged on a rotating disk.

10. The arrangement according to claim 1, with a white light source for object illumination.

11. The arrangement according to claim 1, comprising a light source, illumination optics, pinhole arrangement, imaging optics, object, wherein the light coming from the illuminated object is directed via the pinhole arrangement and a beam splitter in the direction of optically after-magnifying detection optics which are arranged following the image processing means.

12. The arrangement according to claim 1, wherein means are provided for correlating the recorded images with recording conditions.

13. The arrangement according to claim 1, wherein synchronizing markers and sensors for detection thereof are provided.

14. The arrangement according to claim 1, wherein the object is illuminated successively with different wavelengths.

15. The arrangement according to claim 1, wherein illumination is carried out via the same or different pinhole arrangements.

16. The arrangement according to claim 1, wherein at least one CCD camera is used for image recording.

17. The arrangement according to claim 1, wherein at least one TDI camera is used for image recording.

18. The arrangement according to claim 1, wherein lasers of different wavelengths are provided for illumination.

19. The arrangement according to claim 1, wherein the image recording is carried out by a laser scanning microscope.

20. The arrangement according to claim 1, wherein detection and image recording are carried out successively with different detection wavelengths.

21. The arrangement according to claim 1, wherein a recording is carried out with different apertures of the illumination system.

22. The arrangement according to claim 1, wherein light sources are conventional, noncoherent light sources of different wavelengths and predetermined bandwidth.

23. The arrangement according to claim 1, wherein conventional light sources are high-power arc lamps.

24. The arrangement according to claim 1, wherein wavelengths for illumination are extracted from a light source through suitable filers.

25. The arrangement according to claim 1, wherein a selection of wavelengths is carried out by quickly changeable color filers in a form of switching filters or rotating sectored filter wheels.

26. The arrangement according to claim 1, wherein light sources are laser light sources with different wavelengths.

27. The arrangement according to claim 1, in which a spatially parallel or temporally offset imaging of a light source in an object plane of an optical observation device is realized by rhombus-shaped arrays or different, suitably arranged Nipkow type spiral patterns of pinhole elements.

28. The arrangement according to claim 1, in which structures of pinhole elements have a shape of a right-hand oriented or a left-hand oriented rhombic basic array and are used in a stationary manner in case of a moving object or are constructed on a flexible revolving strip.

29. The arrangement according to claim 1, in which parallel confocal scanning of the object plane in pairs is achieved by the displacement of the observation object in combination with a right-hand oriented or a left-hand oriented stationary rhombic basic array.

30. The arrangement according to claim 1, in which either pinhole arrays for illumination are likewise used functionally for confocal image generation or, otherwise, the surface receivers have, in addition, a sensitivity structure which generates confocal characteristics in the image space.

31. The arrangement according to claim 1, in which confocal characteristics of the surface receiver are achieved by masking diaphragms on a receiver, by surface elements of the receiver which are produced so as to be correspondingly sensitized, by an electronic sensitizing circuit or by a software selection control at the receiver or reception signal.

32. The arrangement according to claim 1, in which neutral, polarization-dependent or dichroically-splitting elements, chiefly in the form of an optical cube or a rhomboid base body, are used to divide illumination and imaging bundles.

33. The arrangement according to claim 1, in which polarizing-optical splitters combined with quarter-wave plates are used in main beam paths to achieve a good splitting of illumination and imaging.

34. The arrangement according to claim 1, in which imaging elements have a high degree of optical correction for eliminating imaging errors, are outfitted in some components with zoom-optical characteristics, and an optical after-magnification is provided in a detection beam path.

35. The arrangement according to claim 1, in which imaging elements are produced without optical stresses and two confocal images of an observation object are generated in two polarization states and mixed by selective polarizing-optical parallel and vertical illumination.

36. The arrangement according to claim 1, in which imaging elements have an adjustable transmission aperture, or in a case of dual-bundle arrangements, different transmission apertures, with same magnification in order to generate and subsequently mix two confocal images of same observation object for two different transmission apertures.

37. The arrangement according to claim 1, in which pinhole elements have a circular, square or rhombic basic shape or, alternatively, have an annular shape of the respective basic figure.

38. The arrangement according to claim 37, in which a right-hand-oriented or a left-hand oriented rhombic basic array on a flexible strip is used, by its revolution, for confocal scanning of an object plane.

39. An arrangement for generating object images in a microscope, comprising:

means for recording at least two reflected confocal images of a same object with distinguishable optical object information with respect to image pixels and for storing them one after the other; and

means for combining the recorded and digitized images in a pixel-exact manner, through subtraction;

wherein a parallel confocal generation of raster images of the object is carried out via different pinhole arrangements so that each initial image of the object has a different confocal resolution.

40. A method for generating object images in a microscope, comprising the steps of:

recording at least two reflected confocal images of an object with distinguishable optical object information with respect to image pixels and storing them one after the other; and

combining the recorded and digitized images in a pixel-exact manner and the mixed image formed in this way is stored;

wherein a parallel confocal generation of raster images of the object is carried out via different pinhole arrangements so that each initial image of the object has a different confocal resolution.

41. The method according to claim 40, in which electronic representatives of the different optical confocal images are generated by digitization of a receiver signal.

42. The method according to claim 40, in which different digitized confocal images are stored distinguishably in storages, which is controlled by synchronizing signals and an auxiliary sensor or is carried out by natural correlation of digitized confocal images with respect to two receivers.

43. The method according to claim 40, wherein different digitized, distinguishably stored confocal images are combined to form a mixed image by fast image processors.

44. The method according to claim 40, wherein an image recording isynchronized by marker signals via an auxiliary sensor.

45. The method according to claim 40, characterized by subtraction operations Δ

(P<sub>i″

j″</sub>

) with elements P_ij and P<sub>i′

j′</sub>

of measured confocal image matrices to form resultant elements P<sub>i″

j″</sub>

of the image matrix in the mixed image.

46. A method for generating object images in a microscope, comprising the steps of:

recording at least two reflected confocal images of a same object with distinguishable optical object information with respect to image pixels and storing them one after the other; and

combining the recorded and digitized images in a pixel-exact manner, through subtraction;

wherein a parallel confocal generation of raster images of the object is carried out via different pinhole arrangements so that each initial image of the object has a different confocal resolution.