Light controlled silicon on insulator device
First Claim
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1. An electronic device adapted for control by exposure to light of a pre-determined wavelength, comprising:
- a substrate having upper and lower surfaces;
an insulating layer having upper and lower surfaces on said upper surface of said substrate;
a plurality of FETs formed on said top surface of said insulating layer, each FET having a gate, a body under said gate and a source contacting said body forming a body-to-source junction;
trenches in said substrate, said trenches aligned to said body of at least a portion of said FETs, extending from said lower surface of said substrate to said lower surface of said insulating layer and filled with a light transmitting material; and
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an optical guide layer on said lower surface of said substrate and on said filled trenches.
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Abstract
A device with an optically controlled VT is disclosed. The device includes a semiconductor die which includes an FET, the FET having a gate on an upper surface of a substrate, a body under the gate and a source contacting the body forming a body-to-source junction. A light source is provided for exposing the body to light from the lower surface of the substrate.
32 Citations
22 Claims
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1. An electronic device adapted for control by exposure to light of a pre-determined wavelength, comprising:
- a substrate having upper and lower surfaces;
an insulating layer having upper and lower surfaces on said upper surface of said substrate;
a plurality of FETs formed on said top surface of said insulating layer, each FET having a gate, a body under said gate and a source contacting said body forming a body-to-source junction;
trenches in said substrate, said trenches aligned to said body of at least a portion of said FETs, extending from said lower surface of said substrate to said lower surface of said insulating layer and filled with a light transmitting material; and
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an optical guide layer on said lower surface of said substrate and on said filled trenches. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
- a substrate having upper and lower surfaces;
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10. An electronic device adapted for control by exposure to light of a pre-determined wavelength, comprising:
- a thermally conductive substrate having upper and lower surfaces;
an insulating layer having upper and lower surfaces on said upper surface of said substrate;
a plurality of FETs formed on said top surface of said insulating layer, each FET having a gate, a body under said gate and a source contacting said body forming a body-to-source junction; and
trenches in said substrate, said trenches aligned to said body of at least a portion of said FETs, extending from said lower surface of said substrate to said lower surface of said insulating layer and filled with a light transmitting material to form optical guides. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
- a thermally conductive substrate having upper and lower surfaces;
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20. An electronic device adapted for control by exposure to light of a predetermined wavelength, comprising:
- a semiconductor die comprising;
a heat conductive substrate having upper and lower surfaces;
an insulating layer having upper and lower surfaces on said upper surface of said substrate;
a plurality of FETs formed on said top surface of said insulating layer, each FET having a gate, a body under said gate and a source contacting said body forming a body-to-source junction; and
optical paths formed in said substrate, said optical paths disposed to provide light to said body of at least a portion of said FETs, and extending from said lower surface of said substrate to said lower surface of said insulating layer. - View Dependent Claims (21, 22)
- a semiconductor die comprising;
Specification