Device and a method for thermal sensing

• US 6,545,334 B2
• Filed: 02/12/2002
• Issued: 04/08/2003
• Est. Priority Date: 12/19/1997
• Status: Expired due to Fees

• Current Assignee: TTP Labtech Limited
• Original Assignee: IMEC International
• Inventors: Verhaegen, Katarina
• Primary Examiner(s): Nelms, David
• Assistant Examiner(s): Nguyen, Dao H.
• Application Number:
  US10/076,750
• Publication Number:
  US 20020093070A1
• Time in Patent Office: 420 Days
• Field of Search: 257/467, 257/468, 257/469, 257/532, 438/739, 438/756
• US Class Current: 257/467
• CPC Class Codes: G01K 7/028 using microstructures, e.g. made of silicon
• CPC Class Codes: Y10S 257/93 Thermoelectric, e.g. peltier effect cooling

Abstract

A device for thermal sensing is disclosed based on only one thermopile. The cold junctions of said thermopile are coupled thermally to a first channel comprising a first substance while the hot junctions of said thermopile are coupled thermally to a second channel comprising a second substance, said first and said second channel are separated and thermally isolated one from another. Said device can further comprise a membrane to thermally and electrically isolate said thermopile and to mechanically support said thermopile. Particularly a liquid rubber, i.e. ELASTOSIL LR3003/10A, B can be used as a membrane material. Further disclosed is a method for fabricating such a device using micromachining techniques.

Claims

1. A device for monitoring processes which are accompanied by changes in heat content or enthalpy comprising:

a support;

a membrane having a first surface and a second surface, said membrane mechanically supported by said support on at least one point on one of said first surface or said second surface;

at least one pair of devices, wherein one device of said pair of devices is located in a first region of said first surface of said membrane and the other device of said pair of devices is located in a second region of said first surface of said membrane, wherein said membrane thermally and electrically isolates said first region and said second region, and wherein each device of said pair of devices yields an electrical output signal in response to having an input signal of the thermal type;

a first supply for bringing a first substance in thermal contact with said first region; and

a second supply for bringing a second substance in thermal contact with said second region, wherein said first substance is separated and thermally isolated from said second substance.

2. The device of claim 1, wherein said at least one pair of devices forms a thermocouple, wherein one device of said at least one pair of devices is the hot junction and the other device of said at least one pair of devices is the cold junction of said thermocouple.

3. The device of claim 1, wherein each device of said pair of devices is a thermistor.

4. The device of claim 1, wherein each device of said pair of devices is a semiconductor device.

5. The device of claim 1, wherein said pair of devices yields an electrical output signal proportional to the difference in said input signal of the thermal type.

6. The device of claim 5, wherein said support and said membrane are of the same material.

7. The device of claim 6, wherein said material is silicon.

8. The device of claim 5, wherein said support comprises at least one opening and said first and said second region are positioned above said opening.

9. The device of claim 1, wherein said membrane is of a biocompatible and pressure resistant material.

10. The device of claim 9, wherein said biocompatible and pressure resistant material is selected from the group consisting of silicon oxides, silicon nitrides and polymers.

11. The device of claim 10, wherein said polymer is a liquid rubber.

12. The device of claim 1, further comprising a protective layer on said at least one pair of devices.

13. The device of claim 12, wherein said membrane and said protective layer are of the same material.

14. The device of claim 13, wherein said same material is selected from the group consisting of silicon oxides, silicon nitrides and polymers.

15. The device of claim 1, wherein said support comprises a first and a second opening, wherein said first region is positioned above said first opening and said second region is positioned above said second opening.

16. The device of claim 15, wherein said first and said second openings are molds for fitting in replaceable tubes for supplying said first and said second substance.

17. The device of claim 16, wherein said replaceable tubes are made of glass.

18. The device of claim 16, wherein said replaceable tubes are commercially available dispensing systems.

19. The device of claim 16, wherein said replaceable tubes are micromachined.

20. The device of claim 1, wherein said device is used for monitoring chemical and physical processes accompanied by changes in heat.

21. The device of claim 20, wherein said chemical and physical processes are related to the activity of micro-organisms.

22. The device of claim 20, wherein said chemical and physical processes are related to the activity of biological cells.

23. The device of claim 20, wherein said chemical and physical processes are related to the screening of drugs.

24. A system comprising a modular array of devices as recited in claim 1.

25. A device for monitoring processes which are accompanied by changes in heat content, comprising:

a support having a first opening and a second opening;

a membrane having a first surface and a second surface, said membrane mechanically supported by said support on at least one point on one of said first surface or said second surface; and

at least one pair of devices wherein one device of said pair of devices is located in a first region of said first surface of said membrane and the other device of said pair of devices is located in a second region of said first surface of said membrane, said first region being positioned above said first opening and said second region being positioned above said second opening, wherein said membrane thermally and electrically isolates said first and second regions, and wherein each device of said pair of devices yields an electrical output signal in response to an input signal of the thermal type.

26. A device for monitoring processes which are accompanied by changes in heat content or enthalpy, comprising:

a support layer having an opening;

a membrane with a first surface and a second surface, said membrane being supported by said support layer on at least one point and spanning at least a part of said opening; and

a pair of devices, one device of said pair of devices located in a first region of said first surface of said membrane and the other device of said pair of devices located in a second region of said first surface of said membrane, said first region and said second region being positioned at least partially above said opening, wherein said membrane thermally and electrically isolates said first region and said second region.