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Microelectromechanical apparatus for elevating and tilting a platform

  • US 6,545,385 B2
  • Filed: 04/05/2001
  • Issued: 04/08/2003
  • Est. Priority Date: 04/11/2000
  • Status: Active Grant
First Claim
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1. A microelectromechanical apparatus, comprising:

  • (a) a substrate;

    (b) a platform supported above the substrate by a trio of flexible members, with each flexible member being connected to the platform by a compliant member, and with an end of each flexible member connected to the compliant member further being connected to a pair of elongate elevation members further being anchored to the substrate; and

    (c) means for bending each flexible member, thereby changing the elevation or tilt of the platform.

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