Multiple local probe measuring device and method

• US 6,545,492 B1
• Filed: 09/20/1999
• Issued: 04/08/2003
• Est. Priority Date: 09/20/1999
• Status: Expired due to Term

• Current Assignee: European Molecular Biology Laboratory
• Original Assignee: European Molecular Biology Laboratory
• Inventors: Hörber, Johann Karl Heinrich, Altmann, Stephan Maximilian
• Primary Examiner(s): Sherry, Michael J.
• Assistant Examiner(s): TANG, MINH NHUT
• Application Number:
  US09/399,961
• Time in Patent Office: 1,296 Days
• Field of Search: 324/754, 324/750, 324/758, 324/767, 324/662, 324/761, 324/762, 250/306, 250/307
• US Class Current: 850/3
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 40/00 Calibration, e.g. of probes
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: Y10S 977/863 Atomic force probe
• CPC Class Codes: Y10S 977/869 Optical microscope
• CPC Class Codes: Y10S 977/874 Probe tip array
• CPC Class Codes: Y10S 977/875 with tip detail

Abstract

A local probe measuring device is provided for effecting local measurements of a sample. This device includes first and second local probes for local measurements with respect to a sample or a reference surface. A measurement condition adjustment arrangement is adapted to commonly adjust first and second measurement conditions of the respective first and second local probes with respect to the sample or the reference surface. A detection arrangement is provided that includes first and second detection arrangements associated with the respective first and second local probes and adapted to independently detect first and second measurement data referring to local measurements effected by the respective first and second local probes.

Claims

1. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe; and

a controller adapted to control via said positioning arrangement said distance relations on the basis of at least one of said first and second measurement data,

wherein at least one of said first and second measurement conditions is roughly adjusted on the basis of one of said first and second measurement data and is finely adjusted on the basis of the other of said first and second measurement data.

2. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe; and

a controller adapted to control via said positioning arrangement said distance relations on the basis of at least one of said first and second measurement data,

wherein at least one of said first and second measurement conditions is adjusted on the basis of one of said first and second measurement data according to a time constant and is adjusted on the basis of the other of said first and second measurement data according to another time constant.

3. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe,

wherein said second detection arrangement is adapted to detect a second interaction of said second local probe with the sample or the reference surface independently of any interaction of the first local probe with the sample or the reference surface to obtain said second measurement data,

wherein a controller, said positioning arrangement and said detection arrangement are adapted

to adjust said first measurement condition on the basis of said first measurement data and then to obtain said second measurement data for the resulting second measurement condition, or

to adjust said second measurement condition on the basis of said second measurement data and then to obtain said first measurement data for the resulting first measurement condition, and

wherein said controller and said detection arrangement are adapted to obtain first measurement data as a function of second measurement data or vice versa.

4. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface,

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe; and

a feedback control loop comprising said positioning arrangement and one of said first and second detection arrangements to stabilize at least one of said first and second measurement conditions,

wherein said feedback control loop comprises two feedback control sub-loops, one comprising one of said first and second detection arrangements, and the other comprising the other of said first and second detection arrangements, said feedback control loops having different time constants.

5. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe,

wherein a distance between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is adjustable.

6. The device according to claim 5, wherein the distance is adjustable by tilting at least one of a mounting arrangement of said local probes and a probe substrate integral with said local probes.

7. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust;

a) a first measurement condition of the first local probe with respect to the sample or the reference surface, and

b) a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe,

wherein said detection arrangement comprises a piezo-electrical detection arrangement, and wherein at least one of said local probes comprises piezo-electrical material sensitive to movements of the respective local probe.

8. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction; and

a controller adapted to control via said positioning arrangement said first distance or said first local interaction on the one hand and said second distance or said second local interaction on the other hand on the basis of at least one of said detected first and second distances or on the basis of at least one of said detected first and said detected second interactions,

wherein the respective distance or the respective interaction is roughly adjusted on the basis of one of said first and second distance or interaction and is finely adjusted on the basis of the other of said first and second distance or interaction.

9. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction; and

a controller adapted to control via said positioning arrangement said first distance or said first local interaction on the one hand and said second distance or said second local interaction on the other hand on the basis of at least one of said detected first and second distances or on the basis of at least one of said detected first and said detected second interactions,

wherein the respective distance or interaction is adjusted on the basis of one of said first and second distance or interaction according to a time constant and is adjusted on the basis of the other of said first and second distance or interaction according to another time constant.

10. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction; and

a controller adapted to control via said positioning arrangement said first distance or said first local interaction on the one hand and said second distance or said second local interaction on the other hand on the basis of at least one of said detected first and second distances or on the basis of at least one of said detected first and said detected second interactions,

wherein the controller and the detection arrangement are adapted to adjust via the positioning arrangement at least one of the first and second distances or one of the first and second interactions on the basis the one detected distance or interaction and then to measure the other of the first and second distances or the other of the first and second interactions,

wherein the controller, the positioning arrangement and the detection arrangement are adapted

to adjust the first distance or the first interaction on the basis of the first distance or interaction and then to measure the second distance or interaction for the resulting adjustment of the second local probe, or

to adjust the second distance or the second interaction on the basis of the second distance or interaction and then to measure the first distance or interaction for the resulting adjustment of the first local probe, and

wherein said controller and said detection arrangement are adapted to measure the first distance or interaction as a function of the second distance or interaction or vice versa.

11. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction; and

a controller adapted to control via said positioning arrangement said first distance or said first local interaction on the one hand and said second distance or said

second local interaction on the other hand on the basis of at least one of said detected first and second distances or on the basis of at least one of said detected first and said detected second interactions; and

a feedback control loop comprising said positioning arrangement and one of said first and second detection arrangements to stabilize a distance or interaction relation for at least one of said first and second local probes with respect to said sample or said reference surface,

wherein said feedback control loop comprises two feedback control sub-loops, one comprising one of said first and second detection arrangements, and the other comprising the other of said first and second detection arrangements, said feedback loops having different time constants.

12. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction,

wherein a distance between interaction or measurement sections of said local probes in a height direction associated with said sample or said reference surface is adjustable.

13. The device according to claim 12, wherein the distance is adjustable by tilting at least one of a mounting arrangement of said local probes and a probe substrate integral with said local probes.

14. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, comprising:

a first local probe adapted to interact locally with a sample or a reference surface;

a second local probe adapted to interact locally with a sample or the reference surface;

a rigid mechanical coupling between the first local probe and the second local probe;

a positioning arrangement adapted to commonly adjust

at least one of a first distance of the first local probe with respect to the sample or the reference surface and a first local interaction of the first local probe with the sample or the reference surface, and

at least one of a second distance of the second local probe with respect to the sample or the reference surface and a second local interaction of the second local probe with the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to detect at least one of the first distance and the first local interaction independently of the second distance and the second local interaction, and

a second detection arrangement associated with the second local probe and adapted to detect at least one of the second distance and the second local interaction independently of the first distance and the first local interaction,

wherein said detection arrangement comprises a piezo-electrical detection arrangement, and wherein at least one of said local probes comprises piezo-electrical material sensitive to movements of the respective local probe.

15. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a measurement condition adjustment arrangement adapted to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe, and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe; and

a controller adapted to control via said measurement condition adjustment arrangement said first and second measurement conditions on the basis of at least one of said first and second measurement data,

wherein at least one of said first and second measurement conditions is roughly adjusted on the basis of one of said first and second measurement data and is finely adjusted on the basis of the other of said first and second measurement data.

16. A local probe measuring device for effecting local measurements referring to a sample, comprising:

a first local probe for local measurements with respect to a sample or a reference surface;

a second local probe for local measurements with respect to the sample or the reference surface;

a measurement condition adjustment arrangement adapted to commonly adjust

a first measurement condition of the first local probe with respect to the sample or the reference surface, and

a second measurement condition of the second local probe with respect to the sample or the reference surface;

a detection arrangement comprising

a first detection arrangement associated with the first local probe and adapted to independently detect first measurement data referring to local measurements effected by said first local probe and

a second detection arrangement associated with the second local probe and adapted to independently detect second measurement data referring to local measurements effected by said second local probe; and

a controller adapted to control via said measurement condition adjustment arrangement said first and second measurement conditions on the basis of at least one of said first and second measurement data,

wherein at least one of said first and second measurement conditions is adjusted on the basis of one of said first and second measurement data according to a time constant and is adjusted on the basis of the other of said first and second measurement data according to another time constant.