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High-speed probing apparatus

  • US 6,545,493 B1
  • Filed: 09/11/2000
  • Issued: 04/08/2003
  • Est. Priority Date: 09/29/1999
  • Status: Expired due to Term
First Claim
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1. A high-speed measurement probing apparatus for inspecting electric characteristics of an object under inspection, comprising:

  • a probing apparatus main body;

    a contactor arranged inside the probe apparatus main body, said contactor being replaceable;

    a pin electronics including a plurality of electronic circuits and arranged in a transmission line that is provided for transmission of inspection signals between the contactor and a tester located outside the probing apparatus, said electronic circuits being made of at least one integrated circuit;

    an interposer for electrically connecting the pin electronics and the contactor together, said interposer being replaceable; and

    cooling means for cooling the pin electronics.

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